Electrostatic curved electrode actuators

R. Legtenberg, Johan W. Berenschot, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings IEEE Workshop on Micro Electro Mechanical Systems (MEMS) '95
    Place of PublicationAmsterdam
    Pages37-42
    Publication statusPublished - 29 Jan 1995

    Keywords

    • METIS-130298

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