Electrostatic curved electrode actuators

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings IEEE Workshop on Micro Electro Mechanical Systems (MEMS) '95
Place of Publication	Amsterdam
Pages	37-42
Publication status	Published - 29 Jan 1995

Keywords

@inproceedings{37c759ff67fb4a4a918169e66889a1e6,

title = "Electrostatic curved electrode actuators",

keywords = "METIS-130298",

author = "R. Legtenberg and Berenschot, \{Johan W.\} and Elwenspoek, \{Michael Curt\} and J.H.J. Fluitman",

year = "1995",

month = jan,

day = "29",

language = "Undefined",

pages = "37--42",

booktitle = "Proceedings IEEE Workshop on Micro Electro Mechanical Systems (MEMS) '95",

}