Electrostatic micro walkers for sub-micrometer positioning

Niels Roelof Tas, J. Wissink, T. Sonnenberg, R. Molenaar, B. Vogelzang, J.P. Baartman, M.P. Koster, Michael Curt Elwenspoek, A.F.M. Sander

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 12 Oct 2000
    EventMESA+ Day 2000 - Enschede , Netherlands
    Duration: 12 Oct 200012 Oct 2000

    Conference

    ConferenceMESA+ Day 2000
    CountryNetherlands
    CityEnschede
    Period12/10/0012/10/00
    Other(MESA+ Meeting/Dag)

    Keywords

    • METIS-114831

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