Electrostatic micro walkers for sub-micrometer positioning

Niels Roelof Tas, J. Wissink, T. Sonnenberg, R. Molenaar, B. Vogelzang, J.P. Baartman, M.P. Koster, Michael Curt Elwenspoek, A.F.M. Sander

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 12 Oct 2000
EventMESA+ Day 2000 - Enschede , Netherlands
Duration: 12 Oct 200012 Oct 2000

Conference

ConferenceMESA+ Day 2000
CountryNetherlands
CityEnschede
Period12/10/0012/10/00
Other(MESA+ Meeting/Dag)

Keywords

  • METIS-114831

Cite this

Tas, N. R., Wissink, J., Sonnenberg, T., Molenaar, R., Vogelzang, B., Baartman, J. P., ... Sander, A. F. M. (2000). Electrostatic micro walkers for sub-micrometer positioning. -. Poster session presented at MESA+ Day 2000, Enschede , Netherlands.
Tas, Niels Roelof ; Wissink, J. ; Sonnenberg, T. ; Molenaar, R. ; Vogelzang, B. ; Baartman, J.P. ; Koster, M.P. ; Elwenspoek, Michael Curt ; Sander, A.F.M. / Electrostatic micro walkers for sub-micrometer positioning. Poster session presented at MESA+ Day 2000, Enschede , Netherlands.
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title = "Electrostatic micro walkers for sub-micrometer positioning",
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year = "2000",
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Tas, NR, Wissink, J, Sonnenberg, T, Molenaar, R, Vogelzang, B, Baartman, JP, Koster, MP, Elwenspoek, MC & Sander, AFM 2000, 'Electrostatic micro walkers for sub-micrometer positioning' MESA+ Day 2000, Enschede , Netherlands, 12/10/00 - 12/10/00, pp. -.

Electrostatic micro walkers for sub-micrometer positioning. / Tas, Niels Roelof; Wissink, J.; Sonnenberg, T.; Molenaar, R.; Vogelzang, B.; Baartman, J.P.; Koster, M.P.; Elwenspoek, Michael Curt; Sander, A.F.M.

2000. - Poster session presented at MESA+ Day 2000, Enschede , Netherlands.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Electrostatic micro walkers for sub-micrometer positioning

AU - Tas, Niels Roelof

AU - Wissink, J.

AU - Sonnenberg, T.

AU - Molenaar, R.

AU - Vogelzang, B.

AU - Baartman, J.P.

AU - Koster, M.P.

AU - Elwenspoek, Michael Curt

AU - Sander, A.F.M.

PY - 2000/10/12

Y1 - 2000/10/12

KW - METIS-114831

M3 - Poster

SP - -

ER -

Tas NR, Wissink J, Sonnenberg T, Molenaar R, Vogelzang B, Baartman JP et al. Electrostatic micro walkers for sub-micrometer positioning. 2000. Poster session presented at MESA+ Day 2000, Enschede , Netherlands.