Electrostatic micro walkers for sub-micrometer positioning

Niels Roelof Tas; J. Wissink; T. Sonnenberg; R. Molenaar; B. Vogelzang; J.P. Baartman; M.P. Koster; Michael Curt Elwenspoek; A.F.M. Sander

Electrostatic micro walkers for sub-micrometer positioning

Niels Roelof Tas, J. Wissink, T. Sonnenberg, R. Molenaar, B. Vogelzang, J.P. Baartman, M.P. Koster, Michael Curt Elwenspoek, A.F.M. Sander

Research output: Contribution to conference › Poster › Other research output

Original language	English
Number of pages	1
Publication status	Published - 27 Jun 2000
Event	NanoLink Day 2000 - MESA+ Research Institute, University of Twente, Enschede, Netherlands Duration: 27 Jun 2000 → 27 Jun 2000

Conference

Conference	NanoLink Day 2000
Country/Territory	Netherlands
City	Enschede
Period	27/06/00 → 27/06/00

Cite this

@conference{3bc486bfdfcb4edcadf646b1be19fe86,

title = "Electrostatic micro walkers for sub-micrometer positioning",

author = "Tas, \{Niels Roelof\} and J. Wissink and T. Sonnenberg and R. Molenaar and B. Vogelzang and J.P. Baartman and M.P. Koster and Elwenspoek, \{Michael Curt\} and A.F.M. Sander",

year = "2000",

month = jun,

day = "27",

language = "English",

note = "NanoLink Day 2000 ; Conference date: 27-06-2000 Through 27-06-2000",

}