Electrostatic micro walkers for sub-micrometer positioning

Niels Roelof Tas; J. Wissink; T. Sonnenberg; R. Molenaar; B. Vogelzang; J.P. Baartman; M.P. Koster; Michael Curt Elwenspoek; A.F.M. Sander

Electrostatic micro walkers for sub-micrometer positioning

Niels Roelof Tas, J. Wissink, T. Sonnenberg, R. Molenaar, B. Vogelzang, J.P. Baartman, M.P. Koster, Michael Curt Elwenspoek, A.F.M. Sander

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 12 Oct 2000
Event	MESA+ Day 2000 - Enschede , Netherlands Duration: 12 Oct 2000 → 12 Oct 2000

Conference

Conference	MESA+ Day 2000
Country/Territory	Netherlands
City	Enschede
Period	12/10/00 → 12/10/00
Other	(MESA+ Meeting/Dag)

Keywords

METIS-114831

Cite this

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title = "Electrostatic micro walkers for sub-micrometer positioning",

keywords = "METIS-114831",

author = "Tas, \{Niels Roelof\} and J. Wissink and T. Sonnenberg and R. Molenaar and B. Vogelzang and J.P. Baartman and M.P. Koster and Elwenspoek, \{Michael Curt\} and A.F.M. Sander",

year = "2000",

month = oct,

day = "12",

language = "Undefined",

pages = "--",

note = "MESA+ Day 2000 ; Conference date: 12-10-2000 Through 12-10-2000",

}

TY - CONF

T1 - Electrostatic micro walkers for sub-micrometer positioning

AU - Tas, Niels Roelof

AU - Wissink, J.

AU - Sonnenberg, T.

AU - Molenaar, R.

AU - Vogelzang, B.

AU - Baartman, J.P.

AU - Koster, M.P.

AU - Elwenspoek, Michael Curt

AU - Sander, A.F.M.

PY - 2000/10/12

Y1 - 2000/10/12

KW - METIS-114831

M3 - Poster

SP - -

T2 - MESA+ Day 2000

Y2 - 12 October 2000 through 12 October 2000

ER -