Electrostatic microactuators

Gijsbertus J.M. Krijnen, Niels Roelof Tas, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of International Conference on SMART Technology Demonstrators & Devices
    Pages1-27
    Number of pages27
    Publication statusPublished - 3 Dec 2001

    Keywords

    • METIS-201173
    • IR-42361

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