Electrostatic microactuators fabricated by vertical trench isolation technology

The research described in this thesis is focused on the development of microactuators, which are required for fast and accurate positioning of a recording medium in a new magnetic memory based on scanning probe technology, so called micro Scanning Probe Array Memory (μSPAM). In this chapter, the μSPAM concept is briefly introduced and the preliminary target specifications for positioning of the recording medium are given. A survey of electrostatic micromotors based on the stepping motion, which we believe are promising candidates to perform this demanding positioning task, is given. A general idea behind vertical trench isolation is briefly described. This advanced silicon micromachining technique is thoroughly explored in this thesis as an attractive platform for fabrication of electrostatic microactuators. At the end of this introductory chapter, a complete outline of the thesis is given.