Electrostatic microactuators with integrated gear linkages for mechanical power transmission

R. Legtenberg, Johan W. Berenschot, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    Abstract

    In this paper a surface micromachining process is presented which has been used to fabricate electrostatic microactuators that are interconnected with each other and linked to other movable microstructures by integrated gear linkages. The gear linkages consist of rotational and linear gear structures and the electrostatic microactuators include curved electrode actuators, comb drive actuators and axial gap wobble motors. The micromechanical structures are constructed from polysilicon. Silicon dioxide has been used as a sacrificial layer and silicon nitride was used for electrical insulation. A cyclohexane freeze drying technique is used to prevent problems with stiction. The actuators, loaded with various mechanisms, have been driven successfully by electrostatic actuation. The work is a first step towards mechanical power transmission in micromechanical systems.
    Original languageEnglish
    Title of host publicationProceedings IEEE Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS '96
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages204-209
    Number of pages6
    ISBN (Print)0-7803-2985-6
    DOIs
    Publication statusPublished - 11 Feb 1996
    Event9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996 - San Diego, United States
    Duration: 11 Feb 199615 Feb 1996
    Conference number: 9

    Publication series

    Name
    PublisherIEEE

    Workshop

    Workshop9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996
    Abbreviated titleMEMS
    CountryUnited States
    CitySan Diego
    Period11/02/9615/02/96

    Keywords

    • IR-25556
    • METIS-130358
    • EWI-13576

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