Electrostatic microactuators with integrated gear linkages for mechanical power transmission

R. Legtenberg; Johan W. Berenschot; Michael Curt Elwenspoek; J.H.J. Fluitman

doi:10.1109/MEMSYS.1996.493854

Electrostatic microactuators with integrated gear linkages for mechanical power transmission

R. Legtenberg, Johan W. Berenschot, Michael Curt Elwenspoek, J.H.J. Fluitman

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

In this paper a surface micromachining process is presented which has been used to fabricate electrostatic microactuators that are interconnected with each other and linked to other movable microstructures by integrated gear linkages. The gear linkages consist of rotational and linear gear structures and the electrostatic microactuators include curved electrode actuators, comb drive actuators and axial gap wobble motors. The micromechanical structures are constructed from polysilicon. Silicon dioxide has been used as a sacrificial layer and silicon nitride was used for electrical insulation. A cyclohexane freeze drying technique is used to prevent problems with stiction. The actuators, loaded with various mechanisms, have been driven successfully by electrostatic actuation. The work is a first step towards mechanical power transmission in micromechanical systems.

Original language	English
Title of host publication	Proceedings IEEE Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS '96
Place of Publication	Piscataway
Publisher	IEEE
Pages	204-209
Number of pages	6
ISBN (Print)	0-7803-2985-6
DOIs	https://doi.org/10.1109/MEMSYS.1996.493854
Publication status	Published - 11 Feb 1996
Event	9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996 - San Diego, United States Duration: 11 Feb 1996 → 15 Feb 1996 Conference number: 9

Publication series

Name
Publisher	IEEE

Workshop

Workshop	9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996
Abbreviated title	MEMS
Country/Territory	United States
City	San Diego
Period	11/02/96 → 15/02/96

Keywords

IR-25556
METIS-130358
EWI-13576

Access to Document

10.1109/MEMSYS.1996.493854

Cite this

@inproceedings{87885402e247486db0c437d5ad15dec7,

title = "Electrostatic microactuators with integrated gear linkages for mechanical power transmission",

abstract = "In this paper a surface micromachining process is presented which has been used to fabricate electrostatic microactuators that are interconnected with each other and linked to other movable microstructures by integrated gear linkages. The gear linkages consist of rotational and linear gear structures and the electrostatic microactuators include curved electrode actuators, comb drive actuators and axial gap wobble motors. The micromechanical structures are constructed from polysilicon. Silicon dioxide has been used as a sacrificial layer and silicon nitride was used for electrical insulation. A cyclohexane freeze drying technique is used to prevent problems with stiction. The actuators, loaded with various mechanisms, have been driven successfully by electrostatic actuation. The work is a first step towards mechanical power transmission in micromechanical systems.",

keywords = "IR-25556, METIS-130358, EWI-13576",

author = "R. Legtenberg and Berenschot, {Johan W.} and Elwenspoek, {Michael Curt} and J.H.J. Fluitman",

year = "1996",

month = feb,

day = "11",

doi = "10.1109/MEMSYS.1996.493854",

language = "English",

isbn = "0-7803-2985-6",

publisher = "IEEE",

pages = "204--209",

booktitle = "Proceedings IEEE Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS '96",

note = "9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996, MEMS ; Conference date: 11-02-1996 Through 15-02-1996",

}

Legtenberg, R, Berenschot, JW, Elwenspoek, MC & Fluitman, JHJ 1996, Electrostatic microactuators with integrated gear linkages for mechanical power transmission. in Proceedings IEEE Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS '96. IEEE, Piscataway, pp. 204-209, 9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996, San Diego, California, United States, 11/02/96. https://doi.org/10.1109/MEMSYS.1996.493854

Electrostatic microactuators with integrated gear linkages for mechanical power transmission. / Legtenberg, R.; Berenschot, Johan W.; Elwenspoek, Michael Curt et al.

Proceedings IEEE Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS '96. Piscataway : IEEE, 1996. p. 204-209.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Electrostatic microactuators with integrated gear linkages for mechanical power transmission

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AU - Berenschot, Johan W.

AU - Elwenspoek, Michael Curt

AU - Fluitman, J.H.J.

N1 - Conference code: 9

PY - 1996/2/11

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N2 - In this paper a surface micromachining process is presented which has been used to fabricate electrostatic microactuators that are interconnected with each other and linked to other movable microstructures by integrated gear linkages. The gear linkages consist of rotational and linear gear structures and the electrostatic microactuators include curved electrode actuators, comb drive actuators and axial gap wobble motors. The micromechanical structures are constructed from polysilicon. Silicon dioxide has been used as a sacrificial layer and silicon nitride was used for electrical insulation. A cyclohexane freeze drying technique is used to prevent problems with stiction. The actuators, loaded with various mechanisms, have been driven successfully by electrostatic actuation. The work is a first step towards mechanical power transmission in micromechanical systems.

AB - In this paper a surface micromachining process is presented which has been used to fabricate electrostatic microactuators that are interconnected with each other and linked to other movable microstructures by integrated gear linkages. The gear linkages consist of rotational and linear gear structures and the electrostatic microactuators include curved electrode actuators, comb drive actuators and axial gap wobble motors. The micromechanical structures are constructed from polysilicon. Silicon dioxide has been used as a sacrificial layer and silicon nitride was used for electrical insulation. A cyclohexane freeze drying technique is used to prevent problems with stiction. The actuators, loaded with various mechanisms, have been driven successfully by electrostatic actuation. The work is a first step towards mechanical power transmission in micromechanical systems.

KW - IR-25556

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KW - EWI-13576

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DO - 10.1109/MEMSYS.1996.493854

M3 - Conference contribution

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BT - Proceedings IEEE Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS '96

PB - IEEE

CY - Piscataway

T2 - 9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996

Y2 - 11 February 1996 through 15 February 1996

ER -

Electrostatic microactuators with integrated gear linkages for mechanical power transmission

Abstract

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Keywords

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Cite this