Electrostatic microactuators

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of International Conference on SMART Technology Demonstrators & Devices
Pages	1-27
Number of pages	27
Publication status	Published - 3 Dec 2001
Event	International Conference on SMART Technology Demonstrators & Devices - Edinburgh, UK Duration: 12 Dec 2001 → 14 Dec 2001

Conference	International Conference on SMART Technology Demonstrators & Devices
Period	12/12/01 → 14/12/01
Other	12-14 December 2001

Keywords

@inproceedings{5ab261563c2440f89af665515c620880,

title = "Electrostatic microactuators",

keywords = "METIS-201173, IR-42361",

author = "Krijnen, \{Gijsbertus J.M.\} and Tas, \{Niels Roelof\} and Elwenspoek, \{Michael Curt\}",

year = "2001",

month = dec,

day = "3",

language = "Undefined",

isbn = "--",

pages = "1--27",

booktitle = "Proceedings of International Conference on SMART Technology Demonstrators \& Devices",

note = "International Conference on SMART Technology Demonstrators \& Devices ; Conference date: 12-12-2001 Through 14-12-2001",

}

TY - GEN

T1 - Electrostatic microactuators

AU - Krijnen, Gijsbertus J.M.

AU - Tas, Niels Roelof

AU - Elwenspoek, Michael Curt

PY - 2001/12/3

Y1 - 2001/12/3

KW - METIS-201173

KW - IR-42361

M3 - Conference contribution

SN - --

SP - 1

EP - 27

BT - Proceedings of International Conference on SMART Technology Demonstrators & Devices

T2 - International Conference on SMART Technology Demonstrators & Devices

Y2 - 12 December 2001 through 14 December 2001

ER -