Electrostatic microwalkers: Micro Electromechanics and Micro Tribology

    Research output: ThesisPhD Thesis - Research UT, graduation UT

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    The Micro Walker project ,which is reported in this thesis, focuses on the development of linear micro-motors with a large dynamic range (reach : resolution). The key question for this project is if it is possible to implement walking motion in MEMS, and what can be the performance of linear micromotors employing walking motion. From their potential application in data storage guiding specifications are derived: An output acceleration of a mg load larger than 100 m / s2, 10 nm resolution, reach larger than 10 mm, a driving voltage below 30 V and a maximum linear size smaller than 1 mm. The linear micromotors to made in the project, are based on variable capacitance electrostatic actuation and surface micromachining fabrication technology. Electrostatic motors have already been made in the 18th century. The first known variable capacitance motor has been built by Zipernowski in 1889. Different propulsion principles for linear micromotors have been found in literature: Inertial drive, elastic inertial drive, impact drive, traveling field surface drive, scratch drive, zigzag drive, transformation of rotary into linearly motion, and walking motion. The latter principle is implemented in the project. Controlled friction in clamp feet is necessary for walking. Therefore, microtribology is one of the main topics in this thesis. The focus is on shearing friction in elastic adhesive contacts.
    Original languageUndefined
    • Elwenspoek, Michael Curt, Supervisor
    • Koster, M.P., Supervisor
    Thesis sponsors
    Award date22 Apr 2000
    Place of PublicationEnschede
    Print ISBNs90-3651-435-5
    Publication statusPublished - 22 Apr 2000


    • IR-61700
    • EWI-14544

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