Electrostatic stepping motion microactuator with high-resolution and large force for micro scanning probe array memory

Edin Sarajlic, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Original languageUndefined
    Title of host publicationInnovative mass storage technologies workshop IMST04
    Pages-
    Publication statusPublished - 28 Sep 2004
    Event4th European Workshop on Innovative Mass Storage Tecnologies, IMST 2004: Innovative mass storage technologies workshop IMST04 - Aachen, Germany, Aachen, Germany
    Duration: 28 Sep 200429 Sep 2004

    Workshop

    Workshop4th European Workshop on Innovative Mass Storage Tecnologies, IMST 2004
    CityAachen, Germany
    Period28/09/0429/09/04
    Other28-29 September 2004

    Keywords

    • METIS-219751
    • IR-48360

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