Electrostatic stepping motion microactuator with high-resolution and large force for micro scanning probe array memory

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	Undefined
Title of host publication	Innovative mass storage technologies workshop IMST04
Pages	-
Publication status	Published - 28 Sept 2004
Event	4th European Workshop on Innovative Mass Storage Tecnologies, IMST 2004: Innovative mass storage technologies workshop IMST04 - Aachen, Germany, Aachen, Germany Duration: 28 Sept 2004 → 29 Sept 2004

Workshop	4th European Workshop on Innovative Mass Storage Tecnologies, IMST 2004
City	Aachen, Germany
Period	28/09/04 → 29/09/04
Other	28-29 September 2004

Keywords

@inproceedings{71269dd41792466eb543da9ca7044456,

title = "Electrostatic stepping motion microactuator with high-resolution and large force for micro scanning probe array memory",

keywords = "METIS-219751, IR-48360",

author = "Edin Sarajlic and Berenschot, {Johan W.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

year = "2004",

month = sep,

day = "28",

language = "Undefined",

pages = "--",

booktitle = "Innovative mass storage technologies workshop IMST04",

note = "4th European Workshop on Innovative Mass Storage Tecnologies, IMST 2004 ; Conference date: 28-09-2004 Through 29-09-2004",

}

TY - GEN

T1 - Electrostatic stepping motion microactuator with high-resolution and large force for micro scanning probe array memory

AU - Sarajlic, Edin

AU - Berenschot, Johan W.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 2004/9/28

Y1 - 2004/9/28

KW - METIS-219751

KW - IR-48360

M3 - Conference contribution

SP - -

BT - Innovative mass storage technologies workshop IMST04

T2 - 4th European Workshop on Innovative Mass Storage Tecnologies, IMST 2004

Y2 - 28 September 2004 through 29 September 2004

ER -