Electrostatically actuated double cantileverl AFM probe for high speed imaging

Rolf Vermeer; Edin Sarajlic; Martin Herman Siekman; H. Kawakatsu; H. Fujita; Niels Roelof Tas; Henricus V. Jansen

doi:10.1109/Transducers.2013.6626916

Electrostatically actuated double cantileverl AFM probe for high speed imaging

Rolf Vermeer, Edin Sarajlic, Martin Herman Siekman, H. Kawakatsu, H. Fujita, Niels Roelof Tas, Henricus V. Jansen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

3 Citations (Scopus)

Abstract

We present the design, fabrication and characterization of an electrostatically actuated AFM probe. The probe consists of two cantilevers, a relatively long, stiff cantilever on which end a smaller and softer cantilever with a sharp tip is incorporated. The deflection of the small cantilever is controlled by an electrostatic gap-closing actuator, which is monolithically integrated on the cantilevers. A combination of a small and fast cantilever with an integrated electrostatic actuator allows for a high frequency operation and high speed AFM imaging. We have designed and fabricated a probe with the large cantilever having a stiffness of over 400 N/m and small cantilevers with a stiffness of up to 3.2 N/m and a resonance frequency up to 643 kHz. We have confirmed a proper operation of the probe using high-speed imaging (8 scan lines per second) in electrostatically driven tapping mode.

Original language	Undefined
Title of host publication	17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers & Eurosensors XXVII
Place of Publication	Los Alamitos, CA, USA
Publisher	IEEE
Pages	912-915
Number of pages	4
ISBN (Print)	978-1-4673-5983-2
DOIs	https://doi.org/10.1109/Transducers.2013.6626916
Publication status	Published - Jun 2013
Event	17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 - Barcelona, Spain Duration: 16 Jun 2013 → 20 Jun 2013 Conference number: 17 http://www.transducers-eurosensors2013.org/

Publication series

Name
Publisher	IEEE

Conference

Conference	17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013
Abbreviated title	TRANSDUCERS 2013
Country/Territory	Spain
City	Barcelona
Period	16/06/13 → 20/06/13
Other	Held in conjunction with EUROSENSORS XXVII
Internet address	http://www.transducers-eurosensors2013.org/

Keywords

EWI-23710
Electrostatic actuation
high speed AFM
METIS-302541
IR-88880
AFM probe
double cantilever

Access to Document

10.1109/Transducers.2013.6626916

http://eprints.eemcs.utwente.nl/secure2/23710/01/Vermeer2013.pdf

Cite this

Vermeer, R., Sarajlic, E., Siekman, M. H., Kawakatsu, H., Fujita, H., Tas, N. R., & Jansen, H. V. (2013). Electrostatically actuated double cantileverl AFM probe for high speed imaging. In 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers & Eurosensors XXVII (pp. 912-915). IEEE. https://doi.org/10.1109/Transducers.2013.6626916

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title = "Electrostatically actuated double cantileverl AFM probe for high speed imaging",

abstract = "We present the design, fabrication and characterization of an electrostatically actuated AFM probe. The probe consists of two cantilevers, a relatively long, stiff cantilever on which end a smaller and softer cantilever with a sharp tip is incorporated. The deflection of the small cantilever is controlled by an electrostatic gap-closing actuator, which is monolithically integrated on the cantilevers. A combination of a small and fast cantilever with an integrated electrostatic actuator allows for a high frequency operation and high speed AFM imaging. We have designed and fabricated a probe with the large cantilever having a stiffness of over 400 N/m and small cantilevers with a stiffness of up to 3.2 N/m and a resonance frequency up to 643 kHz. We have confirmed a proper operation of the probe using high-speed imaging (8 scan lines per second) in electrostatically driven tapping mode.",

keywords = "EWI-23710, Electrostatic actuation, high speed AFM, METIS-302541, IR-88880, AFM probe, double cantilever",

author = "Rolf Vermeer and Edin Sarajlic and Siekman, {Martin Herman} and H. Kawakatsu and H. Fujita and Tas, {Niels Roelof} and Jansen, {Henricus V.}",

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publisher = "IEEE",

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Vermeer, R, Sarajlic, E, Siekman, MH, Kawakatsu, H, Fujita, H, Tas, NR & Jansen, HV 2013, Electrostatically actuated double cantileverl AFM probe for high speed imaging. in 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers & Eurosensors XXVII. IEEE, Los Alamitos, CA, USA, pp. 912-915, 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6626916

Electrostatically actuated double cantileverl AFM probe for high speed imaging. / Vermeer, Rolf; Sarajlic, Edin; Siekman, Martin Herman et al.
17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers & Eurosensors XXVII. Los Alamitos, CA, USA: IEEE, 2013. p. 912-915.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Electrostatically actuated double cantileverl AFM probe for high speed imaging

AU - Vermeer, Rolf

AU - Sarajlic, Edin

AU - Siekman, Martin Herman

AU - Kawakatsu, H.

AU - Fujita, H.

AU - Tas, Niels Roelof

AU - Jansen, Henricus V.

N1 - Conference code: 17

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N2 - We present the design, fabrication and characterization of an electrostatically actuated AFM probe. The probe consists of two cantilevers, a relatively long, stiff cantilever on which end a smaller and softer cantilever with a sharp tip is incorporated. The deflection of the small cantilever is controlled by an electrostatic gap-closing actuator, which is monolithically integrated on the cantilevers. A combination of a small and fast cantilever with an integrated electrostatic actuator allows for a high frequency operation and high speed AFM imaging. We have designed and fabricated a probe with the large cantilever having a stiffness of over 400 N/m and small cantilevers with a stiffness of up to 3.2 N/m and a resonance frequency up to 643 kHz. We have confirmed a proper operation of the probe using high-speed imaging (8 scan lines per second) in electrostatically driven tapping mode.

AB - We present the design, fabrication and characterization of an electrostatically actuated AFM probe. The probe consists of two cantilevers, a relatively long, stiff cantilever on which end a smaller and softer cantilever with a sharp tip is incorporated. The deflection of the small cantilever is controlled by an electrostatic gap-closing actuator, which is monolithically integrated on the cantilevers. A combination of a small and fast cantilever with an integrated electrostatic actuator allows for a high frequency operation and high speed AFM imaging. We have designed and fabricated a probe with the large cantilever having a stiffness of over 400 N/m and small cantilevers with a stiffness of up to 3.2 N/m and a resonance frequency up to 643 kHz. We have confirmed a proper operation of the probe using high-speed imaging (8 scan lines per second) in electrostatically driven tapping mode.

KW - EWI-23710

KW - Electrostatic actuation

KW - high speed AFM

KW - METIS-302541

KW - IR-88880

KW - AFM probe

KW - double cantilever

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DO - 10.1109/Transducers.2013.6626916

M3 - Conference contribution

SN - 978-1-4673-5983-2

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EP - 915

BT - 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers & Eurosensors XXVII

PB - IEEE

CY - Los Alamitos, CA, USA

T2 - 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013

Y2 - 16 June 2013 through 20 June 2013

ER -