Electrostatically actuated double cantileverl AFM probe for high speed imaging

Rolf Vermeer, Edin Sarajlic, Martin Herman Siekman, H. Kawakatsu, H. Fujita, Niels Roelof Tas, Henricus V. Jansen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    3 Citations (Scopus)

    Abstract

    We present the design, fabrication and characterization of an electrostatically actuated AFM probe. The probe consists of two cantilevers, a relatively long, stiff cantilever on which end a smaller and softer cantilever with a sharp tip is incorporated. The deflection of the small cantilever is controlled by an electrostatic gap-closing actuator, which is monolithically integrated on the cantilevers. A combination of a small and fast cantilever with an integrated electrostatic actuator allows for a high frequency operation and high speed AFM imaging. We have designed and fabricated a probe with the large cantilever having a stiffness of over 400 N/m and small cantilevers with a stiffness of up to 3.2 N/m and a resonance frequency up to 643 kHz. We have confirmed a proper operation of the probe using high-speed imaging (8 scan lines per second) in electrostatically driven tapping mode.
    Original languageUndefined
    Title of host publication17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers & Eurosensors XXVII
    Place of PublicationLos Alamitos, CA, USA
    PublisherIEEE
    Pages912-915
    Number of pages4
    ISBN (Print)978-1-4673-5983-2
    DOIs
    Publication statusPublished - Jun 2013
    Event17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 - Barcelona, Spain
    Duration: 16 Jun 201320 Jun 2013
    Conference number: 17
    http://www.transducers-eurosensors2013.org/

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013
    Abbreviated titleTRANSDUCERS 2013
    CountrySpain
    CityBarcelona
    Period16/06/1320/06/13
    OtherHeld in conjunction with EUROSENSORS XXVII
    Internet address

    Keywords

    • EWI-23710
    • Electrostatic actuation
    • high speed AFM
    • METIS-302541
    • IR-88880
    • AFM probe
    • double cantilever

    Cite this

    Vermeer, R., Sarajlic, E., Siekman, M. H., Kawakatsu, H., Fujita, H., Tas, N. R., & Jansen, H. V. (2013). Electrostatically actuated double cantileverl AFM probe for high speed imaging. In 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers & Eurosensors XXVII (pp. 912-915). Los Alamitos, CA, USA: IEEE. https://doi.org/10.1109/Transducers.2013.6626916