Abstract
We present the design, fabrication and characterization of an electrostatically actuated AFM probe. The probe consists of two cantilevers, a relatively long, stiff cantilever on which end a smaller and softer cantilever with a sharp tip is incorporated. The deflection of the small cantilever is controlled by an electrostatic gap-closing actuator, which is monolithically integrated on the cantilevers. A combination of a small and fast cantilever with an integrated electrostatic actuator allows for a high frequency operation and high speed AFM imaging. We have designed and fabricated a probe with the large cantilever having a stiffness of over 400 N/m and small cantilevers with a stiffness of up to 3.2 N/m and a resonance frequency up to 643 kHz. We have confirmed a proper operation of the probe using high-speed imaging (8 scan lines per second) in electrostatically driven tapping mode.
Original language | Undefined |
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Title of host publication | 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers & Eurosensors XXVII |
Place of Publication | Los Alamitos, CA, USA |
Publisher | IEEE |
Pages | 912-915 |
Number of pages | 4 |
ISBN (Print) | 978-1-4673-5983-2 |
DOIs | |
Publication status | Published - Jun 2013 |
Event | 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 - Barcelona, Spain Duration: 16 Jun 2013 → 20 Jun 2013 Conference number: 17 http://www.transducers-eurosensors2013.org/ |
Publication series
Name | |
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Publisher | IEEE |
Conference
Conference | 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 |
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Abbreviated title | TRANSDUCERS 2013 |
Country/Territory | Spain |
City | Barcelona |
Period | 16/06/13 → 20/06/13 |
Other | Held in conjunction with EUROSENSORS XXVII |
Internet address |
Keywords
- EWI-23710
- Electrostatic actuation
- high speed AFM
- METIS-302541
- IR-88880
- AFM probe
- double cantilever