Electrostatically actuated double cantileverl AFM probe for high speed imaging

R. Vermeer; E. Sarajlic; M. Siekman; H. Kawakatsu; H. Fujita; N.R. Tas; H.V. Jansen

doi:10.1109/Transducers.2013.6626916

Electrostatically actuated double cantileverl AFM probe for high speed imaging

R. Vermeer
, E. Sarajlic
, M. Siekman
, H. Kawakatsu
, H. Fujita
, N.R. Tas
, H.V. Jansen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

3 Citations (Scopus)

27 Downloads (Pure)

Abstract

We present the design, fabrication and characterization of an electrostatically actuated AFM probe. The probe consists of two cantilevers, a relatively long, stiff cantilever on which end a smaller and softer cantilever with a sharp tip is incorporated. The deflection of the small cantilever is controlled by an electrostatic gap-closing actuator, which is monolithically integrated on the cantilevers. A combination of a small and fast cantilever with an integrated electrostatic actuator allows for a high frequency operation and high speed AFM imaging. We have designed and fabricated a probe with the large cantilever having a stiffness of over 400 N/m and small cantilevers with a stiffness of up to 3.2 N/m and a resonance frequency up to 643 kHz. We have confirmed a proper operation of the probe using high-speed imaging (8 scan lines per second) in electrostatically driven tapping mode.

Original language	English
Title of host publication	17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers & Eurosensors XXVII
Place of Publication	Los Alamitos, CA, USA
Publisher	IEEE
Pages	912-915
Number of pages	4
ISBN (Print)	978-1-4673-5983-2
DOIs	https://doi.org/10.1109/Transducers.2013.6626916
Publication status	Published - Jun 2013
Event	17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 - Barcelona, Spain Duration: 16 Jun 2013 → 20 Jun 2013 Conference number: 17 http://www.transducers-eurosensors2013.org/

Conference

Conference	17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013
Abbreviated title	TRANSDUCERS 2013
Country/Territory	Spain
City	Barcelona
Period	16/06/13 → 20/06/13
Other	Held in conjunction with EUROSENSORS XXVII
Internet address	http://www.transducers-eurosensors2013.org/

Keywords

2020 OA procedure
Electrostatic actuation
High speed AFM
AFM probe
Double cantilever

Access to Document

10.1109/Transducers.2013.6626916

ArticleFinal published version, 973 KBLicence: Taverne

Cite this

@inproceedings{baed7bb2633b48648a1457f6a6e4a5cd,

title = "Electrostatically actuated double cantileverl AFM probe for high speed imaging",

abstract = "We present the design, fabrication and characterization of an electrostatically actuated AFM probe. The probe consists of two cantilevers, a relatively long, stiff cantilever on which end a smaller and softer cantilever with a sharp tip is incorporated. The deflection of the small cantilever is controlled by an electrostatic gap-closing actuator, which is monolithically integrated on the cantilevers. A combination of a small and fast cantilever with an integrated electrostatic actuator allows for a high frequency operation and high speed AFM imaging. We have designed and fabricated a probe with the large cantilever having a stiffness of over 400 N/m and small cantilevers with a stiffness of up to 3.2 N/m and a resonance frequency up to 643 kHz. We have confirmed a proper operation of the probe using high-speed imaging (8 scan lines per second) in electrostatically driven tapping mode.",

keywords = "2020 OA procedure, Electrostatic actuation, High speed AFM, AFM probe, Double cantilever",

author = "R. Vermeer and E. Sarajlic and M. Siekman and H. Kawakatsu and H. Fujita and N.R. Tas and H.V. Jansen",

year = "2013",

month = jun,

doi = "10.1109/Transducers.2013.6626916",

language = "English",

isbn = "978-1-4673-5983-2",

pages = "912--915",

booktitle = "17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers \& Eurosensors XXVII",

publisher = "IEEE",

address = "United States",

note = "17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, TRANSDUCERS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",

url = "http://www.transducers-eurosensors2013.org/",

}

Vermeer, R, Sarajlic, E, Siekman, M, Kawakatsu, H, Fujita, H, Tas, NR & Jansen, HV 2013, Electrostatically actuated double cantileverl AFM probe for high speed imaging. in 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers & Eurosensors XXVII. IEEE, Los Alamitos, CA, USA, pp. 912-915, 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6626916

Electrostatically actuated double cantileverl AFM probe for high speed imaging. / Vermeer, R.; Sarajlic, E.; Siekman, M. et al.
17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers & Eurosensors XXVII. Los Alamitos, CA, USA: IEEE, 2013. p. 912-915.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Electrostatically actuated double cantileverl AFM probe for high speed imaging

AU - Vermeer, R.

AU - Sarajlic, E.

AU - Siekman, M.

AU - Kawakatsu, H.

AU - Fujita, H.

AU - Tas, N.R.

AU - Jansen, H.V.

N1 - Conference code: 17

PY - 2013/6

Y1 - 2013/6

N2 - We present the design, fabrication and characterization of an electrostatically actuated AFM probe. The probe consists of two cantilevers, a relatively long, stiff cantilever on which end a smaller and softer cantilever with a sharp tip is incorporated. The deflection of the small cantilever is controlled by an electrostatic gap-closing actuator, which is monolithically integrated on the cantilevers. A combination of a small and fast cantilever with an integrated electrostatic actuator allows for a high frequency operation and high speed AFM imaging. We have designed and fabricated a probe with the large cantilever having a stiffness of over 400 N/m and small cantilevers with a stiffness of up to 3.2 N/m and a resonance frequency up to 643 kHz. We have confirmed a proper operation of the probe using high-speed imaging (8 scan lines per second) in electrostatically driven tapping mode.

AB - We present the design, fabrication and characterization of an electrostatically actuated AFM probe. The probe consists of two cantilevers, a relatively long, stiff cantilever on which end a smaller and softer cantilever with a sharp tip is incorporated. The deflection of the small cantilever is controlled by an electrostatic gap-closing actuator, which is monolithically integrated on the cantilevers. A combination of a small and fast cantilever with an integrated electrostatic actuator allows for a high frequency operation and high speed AFM imaging. We have designed and fabricated a probe with the large cantilever having a stiffness of over 400 N/m and small cantilevers with a stiffness of up to 3.2 N/m and a resonance frequency up to 643 kHz. We have confirmed a proper operation of the probe using high-speed imaging (8 scan lines per second) in electrostatically driven tapping mode.

KW - 2020 OA procedure

KW - Electrostatic actuation

KW - High speed AFM

KW - AFM probe

KW - Double cantilever

U2 - 10.1109/Transducers.2013.6626916

DO - 10.1109/Transducers.2013.6626916

M3 - Conference contribution

SN - 978-1-4673-5983-2

SP - 912

EP - 915

BT - 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers & Eurosensors XXVII

PB - IEEE

CY - Los Alamitos, CA, USA

T2 - 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013

Y2 - 16 June 2013 through 20 June 2013

ER -

Electrostatically actuated double cantileverl AFM probe for high speed imaging

Abstract

Conference

Keywords

Access to Document

Fingerprint

Cite this