Electrostatically driven high-extinction mechano-optical on/off switch

P.V. Lambeck, G.J. Veldhuis, T. Nauta, C. Gui, J.W. Berenschot

    Research output: Contribution to conferencePaperAcademicpeer-review

    Original languageEnglish
    Number of pages2
    Publication statusPublished - 20 Jul 1998
    Event1998 IEEE/LEOS Summer Topical Meeting: Optical MEMS - Monterey Plaza Hotel, Monterey, United States
    Duration: 20 Jul 199822 Jul 1998

    Conference

    Conference1998 IEEE/LEOS Summer Topical Meeting
    Abbreviated titleMOEMS 1998
    Country/TerritoryUnited States
    CityMonterey
    Period20/07/9822/07/98

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