Electrostatically driven high-extinction mechano-optical on/off switch

Paul Lambeck, G.J. Veldhuis, T. Nauta, C. Gui, Johan W. Berenschot

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of MOEMS Conference
    Place of PublicationMonterey
    Pages-
    Number of pages2
    Publication statusPublished - 20 Jul 1998

    Keywords

    • METIS-112752

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