Electrostatically driven high-extinction mechano-optical on/off switch

P.V. Lambeck, G.J. Veldhuis, T. Nauta, C. Gui, J.W. Berenschot

Research output: Contribution to conference › Paper › peer-review

Original language	English
Number of pages	2
Publication status	Published - 20 Jul 1998
Event	1998 IEEE/LEOS Summer Topical Meeting: Optical MEMS - Monterey Plaza Hotel, Monterey, United States Duration: 20 Jul 1998 → 22 Jul 1998

Conference	1998 IEEE/LEOS Summer Topical Meeting
Abbreviated title	MOEMS 1998
Country/Territory	United States
City	Monterey
Period	20/07/98 → 22/07/98

Cite this

@conference{5c109dbac38f4470ab05b1e373e40397,

title = "Electrostatically driven high-extinction mechano-optical on/off switch",

author = "P.V. Lambeck and G.J. Veldhuis and T. Nauta and C. Gui and J.W. Berenschot",

year = "1998",

month = jul,

day = "20",

language = "English",

note = "1998 IEEE/LEOS Summer Topical Meeting : Optical MEMS, MOEMS 1998 ; Conference date: 20-07-1998 Through 22-07-1998",

}