Electrostatically driven high-extinction mechano-optical on/off switch

Paul Lambeck, G.J. Veldhuis, T. Nauta, C. Gui, Johan W. Berenschot

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of MOEMS Conference
Place of Publication	Monterey
Pages	-
Number of pages	2
Publication status	Published - 20 Jul 1998

Keywords

@inproceedings{5c109dbac38f4470ab05b1e373e40397,

title = "Electrostatically driven high-extinction mechano-optical on/off switch",

keywords = "METIS-112752",

author = "Paul Lambeck and G.J. Veldhuis and T. Nauta and C. Gui and Berenschot, {Johan W.}",

year = "1998",

month = jul,

day = "20",

language = "Undefined",

pages = "--",

booktitle = "Proceedings of MOEMS Conference",

}