Electrostatically driven vacuum-encapsulated polysilicon resonators part II. theory and performance

H.A.C. Tilmans, Harrie A.C. Tilmans, Rob Legtenberg, R. Legtenberg

Research output: Contribution to journalArticleAcademicpeer-review

  • 326 Citations

Abstract

In this paper, the design, modelling and performance characteristics of electrostatically driven vacuum-encapsulated polysilicon resonators are addressed. A one-port configuration is preferably employed for excitation and detection of the vibration. Mechanical instability (pull-in) is discussed on the basis of the energy minimum principle. An expression for the pull-in voltage of a beam is given. The electromechanical behaviour in a limited frequency regime around the fundamental resonance is accurately modelled by an electric circuit consisting of a (static) capacitor shunted by a series (dynamic) RLC branch. The d.c. bias dependence of the circuit components and of the series resonance frequency has been experimentally investigated and is compared with the theory. The large-amplitude behaviour is discussed as well. The plate modulus and residual strain of boron-doped polysilicon are estimated from the resonance frequencies of microbridges of varying lengths. The feasibility of their application as resonant strain gauges is investigated. The 210 m long beams typically have an unloaded fundamental frequency of 324 kHz, a gauge factor of 2400 and an uncompensated temperature coefficient of -135 ppm 0C-1.
LanguageUndefined
Pages67-84
Number of pages18
JournalSensors and actuators. A: Physical
Volume1994
Issue number45
DOIs
Publication statusPublished - 1994

Keywords

  • METIS-111589
  • IR-14405

Cite this

Tilmans, H.A.C. ; Tilmans, Harrie A.C. ; Legtenberg, Rob ; Legtenberg, R. / Electrostatically driven vacuum-encapsulated polysilicon resonators part II. theory and performance. In: Sensors and actuators. A: Physical. 1994 ; Vol. 1994, No. 45. pp. 67-84.
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abstract = "In this paper, the design, modelling and performance characteristics of electrostatically driven vacuum-encapsulated polysilicon resonators are addressed. A one-port configuration is preferably employed for excitation and detection of the vibration. Mechanical instability (pull-in) is discussed on the basis of the energy minimum principle. An expression for the pull-in voltage of a beam is given. The electromechanical behaviour in a limited frequency regime around the fundamental resonance is accurately modelled by an electric circuit consisting of a (static) capacitor shunted by a series (dynamic) RLC branch. The d.c. bias dependence of the circuit components and of the series resonance frequency has been experimentally investigated and is compared with the theory. The large-amplitude behaviour is discussed as well. The plate modulus and residual strain of boron-doped polysilicon are estimated from the resonance frequencies of microbridges of varying lengths. The feasibility of their application as resonant strain gauges is investigated. The 210 m long beams typically have an unloaded fundamental frequency of 324 kHz, a gauge factor of 2400 and an uncompensated temperature coefficient of -135 ppm 0C-1.",
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Electrostatically driven vacuum-encapsulated polysilicon resonators part II. theory and performance. / Tilmans, H.A.C.; Tilmans, Harrie A.C.; Legtenberg, Rob; Legtenberg, R.

In: Sensors and actuators. A: Physical, Vol. 1994, No. 45, 1994, p. 67-84.

Research output: Contribution to journalArticleAcademicpeer-review

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T1 - Electrostatically driven vacuum-encapsulated polysilicon resonators part II. theory and performance

AU - Tilmans, H.A.C.

AU - Tilmans, Harrie A.C.

AU - Legtenberg, Rob

AU - Legtenberg, R.

PY - 1994

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N2 - In this paper, the design, modelling and performance characteristics of electrostatically driven vacuum-encapsulated polysilicon resonators are addressed. A one-port configuration is preferably employed for excitation and detection of the vibration. Mechanical instability (pull-in) is discussed on the basis of the energy minimum principle. An expression for the pull-in voltage of a beam is given. The electromechanical behaviour in a limited frequency regime around the fundamental resonance is accurately modelled by an electric circuit consisting of a (static) capacitor shunted by a series (dynamic) RLC branch. The d.c. bias dependence of the circuit components and of the series resonance frequency has been experimentally investigated and is compared with the theory. The large-amplitude behaviour is discussed as well. The plate modulus and residual strain of boron-doped polysilicon are estimated from the resonance frequencies of microbridges of varying lengths. The feasibility of their application as resonant strain gauges is investigated. The 210 m long beams typically have an unloaded fundamental frequency of 324 kHz, a gauge factor of 2400 and an uncompensated temperature coefficient of -135 ppm 0C-1.

AB - In this paper, the design, modelling and performance characteristics of electrostatically driven vacuum-encapsulated polysilicon resonators are addressed. A one-port configuration is preferably employed for excitation and detection of the vibration. Mechanical instability (pull-in) is discussed on the basis of the energy minimum principle. An expression for the pull-in voltage of a beam is given. The electromechanical behaviour in a limited frequency regime around the fundamental resonance is accurately modelled by an electric circuit consisting of a (static) capacitor shunted by a series (dynamic) RLC branch. The d.c. bias dependence of the circuit components and of the series resonance frequency has been experimentally investigated and is compared with the theory. The large-amplitude behaviour is discussed as well. The plate modulus and residual strain of boron-doped polysilicon are estimated from the resonance frequencies of microbridges of varying lengths. The feasibility of their application as resonant strain gauges is investigated. The 210 m long beams typically have an unloaded fundamental frequency of 324 kHz, a gauge factor of 2400 and an uncompensated temperature coefficient of -135 ppm 0C-1.

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KW - IR-14405

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