Electrostatically driven vacuum encapsulated polysilicon resonators

H.A.C. Tilmans, R. Legtenberg

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 5 Oct 1992
    EventEurosensors VI - San Sebastian, Spain
    Duration: 5 Oct 19927 Oct 1992
    Conference number: 6

    Conference

    ConferenceEurosensors VI
    CountrySpain
    CitySan Sebastian
    Period5/10/927/10/92

    Keywords

    • METIS-117967

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