Electrostatically driven vacuum encapsulated polysilicon resonators

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 5 Oct 1992
Event	Eurosensors VI - San Sebastian, Spain Duration: 5 Oct 1992 → 7 Oct 1992 Conference number: 6

Keywords

@conference{7ecc0bfeb21c44ab83b9ab348f1b8982,

title = "Electrostatically driven vacuum encapsulated polysilicon resonators",

keywords = "METIS-117967",

author = "H.A.C. Tilmans and R. Legtenberg",

year = "1992",

month = oct,

day = "5",

language = "Undefined",

pages = "--",

note = "Eurosensors VI ; Conference date: 05-10-1992 Through 07-10-1992",

}