Electrostatically driven vacuum encapsulated polysilicon resonators

H.A.C. Tilmans, R. Legtenberg

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 17 Jun 1993
    EventMESA Dag 1993 - Dish Hotel, Enschede, Netherlands
    Duration: 17 Jun 199317 Jun 1993

    Conference

    ConferenceMESA Dag 1993
    CountryNetherlands
    CityEnschede
    Period17/06/9317/06/93
    Other(MESA Day/Meeting)

    Keywords

    • METIS-117989

    Cite this

    Tilmans, H. A. C., & Legtenberg, R. (1993). Electrostatically driven vacuum encapsulated polysilicon resonators. -. Poster session presented at MESA Dag 1993, Enschede, Netherlands.
    Tilmans, H.A.C. ; Legtenberg, R. / Electrostatically driven vacuum encapsulated polysilicon resonators. Poster session presented at MESA Dag 1993, Enschede, Netherlands.
    @conference{d4c1ac04ac9445d8aa47a63390054f17,
    title = "Electrostatically driven vacuum encapsulated polysilicon resonators",
    keywords = "METIS-117989",
    author = "H.A.C. Tilmans and R. Legtenberg",
    year = "1993",
    month = "6",
    day = "17",
    language = "Undefined",
    pages = "--",
    note = "null ; Conference date: 17-06-1993 Through 17-06-1993",

    }

    Tilmans, HAC & Legtenberg, R 1993, 'Electrostatically driven vacuum encapsulated polysilicon resonators' MESA Dag 1993, Enschede, Netherlands, 17/06/93 - 17/06/93, pp. -.

    Electrostatically driven vacuum encapsulated polysilicon resonators. / Tilmans, H.A.C.; Legtenberg, R.

    1993. - Poster session presented at MESA Dag 1993, Enschede, Netherlands.

    Research output: Contribution to conferencePosterOther research output

    TY - CONF

    T1 - Electrostatically driven vacuum encapsulated polysilicon resonators

    AU - Tilmans, H.A.C.

    AU - Legtenberg, R.

    PY - 1993/6/17

    Y1 - 1993/6/17

    KW - METIS-117989

    M3 - Poster

    SP - -

    ER -

    Tilmans HAC, Legtenberg R. Electrostatically driven vacuum encapsulated polysilicon resonators. 1993. Poster session presented at MESA Dag 1993, Enschede, Netherlands.