Electrostatically driven vacuum encapsulated polysilicon resonators

R. Legtenberg

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 26 Nov 1993
    EventFOM Symposium Wetenschappelijke Instrumentatie 1993 - Congrescentrum De Reehorst, Ede, Netherlands
    Duration: 26 Nov 199326 Nov 1993

    Conference

    ConferenceFOM Symposium Wetenschappelijke Instrumentatie 1993
    CountryNetherlands
    CityEde
    Period26/11/9326/11/93

    Keywords

    • METIS-133529

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