Electrostatically driven vacuum encapsulated polysilicon resonators

R. Legtenberg

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 26 Nov 1993

    Keywords

    • METIS-133529

    Cite this

    @conference{ef2cc57108034ed986175246d32d629e,
    title = "Electrostatically driven vacuum encapsulated polysilicon resonators",
    keywords = "METIS-133529",
    author = "R. Legtenberg",
    year = "1993",
    month = "11",
    day = "26",
    language = "Undefined",
    pages = "--",

    }

    Electrostatically driven vacuum encapsulated polysilicon resonators. / Legtenberg, R.

    1993. -.

    Research output: Contribution to conferencePosterOther research output

    TY - CONF

    T1 - Electrostatically driven vacuum encapsulated polysilicon resonators

    AU - Legtenberg, R.

    PY - 1993/11/26

    Y1 - 1993/11/26

    KW - METIS-133529

    M3 - Poster

    SP - -

    ER -