Electrostatically driven vacuum encapsulated polysilicon resonators

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 26 Nov 1993
Event	FOM Symposium Wetenschappelijke Instrumentatie 1993 - Congrescentrum De Reehorst, Ede, Netherlands Duration: 26 Nov 1993 → 26 Nov 1993

Conference	FOM Symposium Wetenschappelijke Instrumentatie 1993
Country/Territory	Netherlands
City	Ede
Period	26/11/93 → 26/11/93

Keywords

@conference{ef2cc57108034ed986175246d32d629e,

title = "Electrostatically driven vacuum encapsulated polysilicon resonators",

keywords = "METIS-133529",

author = "R. Legtenberg",

year = "1993",

month = nov,

day = "26",

language = "Undefined",

pages = "--",

note = "FOM Symposium Wetenschappelijke Instrumentatie 1993 ; Conference date: 26-11-1993 Through 26-11-1993",

}