Electrostatically driven vacuum encapsulated polysilicon resonators

R. Legtenberg

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 26 Nov 1993
    EventFOM Symposium Wetenschappelijke Instrumentatie 1993 - Congrescentrum De Reehorst, Ede, Netherlands
    Duration: 26 Nov 199326 Nov 1993

    Conference

    ConferenceFOM Symposium Wetenschappelijke Instrumentatie 1993
    CountryNetherlands
    CityEde
    Period26/11/9326/11/93

    Keywords

    • METIS-133529

    Cite this

    Legtenberg, R. (1993). Electrostatically driven vacuum encapsulated polysilicon resonators. -. Poster session presented at FOM Symposium Wetenschappelijke Instrumentatie 1993, Ede, Netherlands.
    Legtenberg, R. / Electrostatically driven vacuum encapsulated polysilicon resonators. Poster session presented at FOM Symposium Wetenschappelijke Instrumentatie 1993, Ede, Netherlands.
    @conference{ef2cc57108034ed986175246d32d629e,
    title = "Electrostatically driven vacuum encapsulated polysilicon resonators",
    keywords = "METIS-133529",
    author = "R. Legtenberg",
    year = "1993",
    month = "11",
    day = "26",
    language = "Undefined",
    pages = "--",
    note = "null ; Conference date: 26-11-1993 Through 26-11-1993",

    }

    Legtenberg, R 1993, 'Electrostatically driven vacuum encapsulated polysilicon resonators' FOM Symposium Wetenschappelijke Instrumentatie 1993, Ede, Netherlands, 26/11/93 - 26/11/93, pp. -.

    Electrostatically driven vacuum encapsulated polysilicon resonators. / Legtenberg, R.

    1993. - Poster session presented at FOM Symposium Wetenschappelijke Instrumentatie 1993, Ede, Netherlands.

    Research output: Contribution to conferencePoster

    TY - CONF

    T1 - Electrostatically driven vacuum encapsulated polysilicon resonators

    AU - Legtenberg, R.

    PY - 1993/11/26

    Y1 - 1993/11/26

    KW - METIS-133529

    M3 - Poster

    SP - -

    ER -

    Legtenberg R. Electrostatically driven vacuum encapsulated polysilicon resonators. 1993. Poster session presented at FOM Symposium Wetenschappelijke Instrumentatie 1993, Ede, Netherlands.