Electrostatically driven vacuum-encapsulated polysilicon resonators: Part I. design and fabrication

Rob Legtenberg, Harrie A.C. Tilmans

    Research output: Contribution to journalArticleAcademicpeer-review

    184 Citations (Scopus)
    176 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Electrostatically driven vacuum-encapsulated polysilicon resonators: Part I. design and fabrication'. Together they form a unique fingerprint.

    Physics & Astronomy

    Engineering & Materials Science

    Chemistry