Ellipsometry with an undetermined polarization state

Fenz Liu, Christopher James Lee, Juequan Chen, Eric Louis, Petrus J.M. van der Slot, Klaus J. Boller, Frederik Bijkerk

Research output: Contribution to conferencePosterOther research output

Abstract

Highly accurate polarization-based measurements can be done without knowing the absolute polarization state of the probing light field. We demonstrate this approach by measuring Ellipsometric data of carbon thin films with high accuracy. OCIS codes: (120.2130) Ellipsometry and polarimetry, (060.2420) Fibers, polarization-maintaining, (060.2270) Fiber characterization, (340.7470) X-ray mirrors.
Original languageEnglish
Pages-
Publication statusPublished - 6 May 2012
EventConference on Lasers and Electro-Optics, CLEO 2012 - San Jose McEnery Convention Center, San Jose, United States
Duration: 6 May 201211 May 2012

Conference

ConferenceConference on Lasers and Electro-Optics, CLEO 2012
Abbreviated titleCLEO
CountryUnited States
CitySan Jose
Period6/05/1211/05/12

Keywords

  • METIS-294183

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