Encased cantilevers for low-noise force and mass sensing in liquids

D. Ziegler; A. Klaassen; D. Bahri; D. Chmielewski; A. Nievergelt; Friedrich Gunther Mugele; J. Sader; P.D. Ashby

doi:10.1109/MEMSYS.2014.6765590

Encased cantilevers for low-noise force and mass sensing in liquids

D. Ziegler, A. Klaassen, D. Bahri, D. Chmielewski, A. Nievergelt, Friedrich Gunther Mugele, J. Sader, P.D. Ashby

Research output: Contribution to conference › Abstract › Other research output

12 Citations (Scopus)

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Abstract

Viscous damping severely limits the performance of resonator based sensing in liquids. We present encased cantilevers that overcome this limitation with a transparent and hydrophobic encasement built around the resonator. Only a few micrometers of the cantilever probe protrude from the encasement and water does not enter the encasement. This maintains high Q-factors and reduces the thermo-mechanical noise levels by over one order of magnitude and reaches minimal detectable forces of 12 fN/•Hz in liquids. These probes expand the frontiers of cantilever based sensing. We discuss their design and fabrication with special focus on squeeze film damping and demonstrate their successful application for quantitative mass sensing of single nanoparticles and gentle Atomic Force Microscopy imaging of soft matter in liquids.

Original language	English
Pages	128-131
DOIs	https://doi.org/10.1109/MEMSYS.2014.6765590
Publication status	Published - 26 Jan 2014
Event	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, United States Duration: 26 Jan 2014 → 30 Jan 2014 Conference number: 27

Conference

Conference	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Abbreviated title	MEMS
Country/Territory	United States
City	San Francisco
Period	26/01/14 → 30/01/14

Keywords

METIS-300599
IR-91204

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10.1109/MEMSYS.2014.6765590

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Ziegler, D., Klaassen, A., Bahri, D., Chmielewski, D., Nievergelt, A., Mugele, F. G., Sader, J., & Ashby, P. D. (2014). Encased cantilevers for low-noise force and mass sensing in liquids. 128-131. Abstract from 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, California, United States. https://doi.org/10.1109/MEMSYS.2014.6765590

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abstract = "Viscous damping severely limits the performance of resonator based sensing in liquids. We present encased cantilevers that overcome this limitation with a transparent and hydrophobic encasement built around the resonator. Only a few micrometers of the cantilever probe protrude from the encasement and water does not enter the encasement. This maintains high Q-factors and reduces the thermo-mechanical noise levels by over one order of magnitude and reaches minimal detectable forces of 12 fN/•Hz in liquids. These probes expand the frontiers of cantilever based sensing. We discuss their design and fabrication with special focus on squeeze film damping and demonstrate their successful application for quantitative mass sensing of single nanoparticles and gentle Atomic Force Microscopy imaging of soft matter in liquids.",

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author = "D. Ziegler and A. Klaassen and D. Bahri and D. Chmielewski and A. Nievergelt and Mugele, {Friedrich Gunther} and J. Sader and P.D. Ashby",

year = "2014",

month = jan,

day = "26",

doi = "10.1109/MEMSYS.2014.6765590",

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T1 - Encased cantilevers for low-noise force and mass sensing in liquids

AU - Ziegler, D.

AU - Klaassen, A.

AU - Bahri, D.

AU - Chmielewski, D.

AU - Nievergelt, A.

AU - Mugele, Friedrich Gunther

AU - Sader, J.

AU - Ashby, P.D.

N1 - Conference code: 27

PY - 2014/1/26

Y1 - 2014/1/26

N2 - Viscous damping severely limits the performance of resonator based sensing in liquids. We present encased cantilevers that overcome this limitation with a transparent and hydrophobic encasement built around the resonator. Only a few micrometers of the cantilever probe protrude from the encasement and water does not enter the encasement. This maintains high Q-factors and reduces the thermo-mechanical noise levels by over one order of magnitude and reaches minimal detectable forces of 12 fN/•Hz in liquids. These probes expand the frontiers of cantilever based sensing. We discuss their design and fabrication with special focus on squeeze film damping and demonstrate their successful application for quantitative mass sensing of single nanoparticles and gentle Atomic Force Microscopy imaging of soft matter in liquids.

AB - Viscous damping severely limits the performance of resonator based sensing in liquids. We present encased cantilevers that overcome this limitation with a transparent and hydrophobic encasement built around the resonator. Only a few micrometers of the cantilever probe protrude from the encasement and water does not enter the encasement. This maintains high Q-factors and reduces the thermo-mechanical noise levels by over one order of magnitude and reaches minimal detectable forces of 12 fN/•Hz in liquids. These probes expand the frontiers of cantilever based sensing. We discuss their design and fabrication with special focus on squeeze film damping and demonstrate their successful application for quantitative mass sensing of single nanoparticles and gentle Atomic Force Microscopy imaging of soft matter in liquids.

KW - METIS-300599

KW - IR-91204

U2 - 10.1109/MEMSYS.2014.6765590

DO - 10.1109/MEMSYS.2014.6765590

M3 - Abstract

SP - 128

EP - 131

T2 - 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014

Y2 - 26 January 2014 through 30 January 2014

ER -

Encased cantilevers for low-noise force and mass sensing in liquids

Abstract

Conference

Keywords

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