Engineering of Biomimetic Hair-Flow Sensor Arrays Dedicated to High-Resolution Flow Field Measurements

A.M.K. Dagamseh; C.M. Bruinink; H. Droogendijk; Remco J. Wiegerink; Theodorus S.J. Lammerink; Gijsbertus J.M. Krijnen

doi:10.1109/ICSENS.2010.5690705

Engineering of Biomimetic Hair-Flow Sensor Arrays Dedicated to High-Resolution Flow Field Measurements

A.M.K. Dagamseh, C.M. Bruinink, H. Droogendijk, Remco J. Wiegerink, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

30 Citations (Scopus)

259 Downloads (Pure)

Abstract

This paper addresses the latest developments in biomimetic hair-flow sensors towards sensitive high-density arrays. Improving the electrodes design of the hair sensor, using Silicon-on-Insulator (SOI) wafer technology, has resulted in the ability to measure small capacitance changes as caused by minute rotations of single-hair sensors. The detection limit, as measured in a bandwidth of 3 kHz, was about 1 mm/s air-flow amplitude, an enhancement of 52% in comparison to the previous hair-sensor array design. The directivity pattern was improved now closely resembling a figure of eight. These sensors open possibilities for high-resolution flow pattern observations.

Original language	Undefined
Title of host publication	IEEE Sensors 2010 conference
Publisher	IEEE
Pages	2251-2254
Number of pages	4
ISBN (Print)	978-1-4244-8168-2
DOIs	https://doi.org/10.1109/ICSENS.2010.5690705
Publication status	Published - Nov 2010
Event	9th IEEE Sensors 2010 - Hilton Waikoloa Village, Waikoloa, United States Duration: 1 Nov 2010 → 4 Nov 2010 Conference number: 9

Publication series

Name
Publisher	IEEE
ISSN (Print)	0924-4247
ISSN (Electronic)	1873-3069

Conference

Conference	9th IEEE Sensors 2010
Country/Territory	United States
City	Waikoloa
Period	1/11/10 → 4/11/10

Keywords

IR-74160
EWI-17705
TST-Life like
METIS-276020

Access to Document

10.1109/ICSENS.2010.5690705

Cite this

@inproceedings{53c03edfa7a94ad8a879f53de23e0a37,

title = "Engineering of Biomimetic Hair-Flow Sensor Arrays Dedicated to High-Resolution Flow Field Measurements",

abstract = "This paper addresses the latest developments in biomimetic hair-flow sensors towards sensitive high-density arrays. Improving the electrodes design of the hair sensor, using Silicon-on-Insulator (SOI) wafer technology, has resulted in the ability to measure small capacitance changes as caused by minute rotations of single-hair sensors. The detection limit, as measured in a bandwidth of 3 kHz, was about 1 mm/s air-flow amplitude, an enhancement of 52% in comparison to the previous hair-sensor array design. The directivity pattern was improved now closely resembling a figure of eight. These sensors open possibilities for high-resolution flow pattern observations.",

keywords = "IR-74160, EWI-17705, TST-Life like, METIS-276020",

author = "A.M.K. Dagamseh and C.M. Bruinink and H. Droogendijk and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Krijnen, {Gijsbertus J.M.}",

note = "10.1109/ICSENS.2010.5690705 ; 9th IEEE Sensors 2010 ; Conference date: 01-11-2010 Through 04-11-2010",

year = "2010",

month = nov,

doi = "10.1109/ICSENS.2010.5690705",

language = "Undefined",

isbn = "978-1-4244-8168-2",

publisher = "IEEE",

pages = "2251--2254",

booktitle = "IEEE Sensors 2010 conference",

address = "United States",

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TY - GEN

T1 - Engineering of Biomimetic Hair-Flow Sensor Arrays Dedicated to High-Resolution Flow Field Measurements

AU - Dagamseh, A.M.K.

AU - Bruinink, C.M.

AU - Droogendijk, H.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Krijnen, Gijsbertus J.M.

N1 - Conference code: 9

PY - 2010/11

Y1 - 2010/11

N2 - This paper addresses the latest developments in biomimetic hair-flow sensors towards sensitive high-density arrays. Improving the electrodes design of the hair sensor, using Silicon-on-Insulator (SOI) wafer technology, has resulted in the ability to measure small capacitance changes as caused by minute rotations of single-hair sensors. The detection limit, as measured in a bandwidth of 3 kHz, was about 1 mm/s air-flow amplitude, an enhancement of 52% in comparison to the previous hair-sensor array design. The directivity pattern was improved now closely resembling a figure of eight. These sensors open possibilities for high-resolution flow pattern observations.

AB - This paper addresses the latest developments in biomimetic hair-flow sensors towards sensitive high-density arrays. Improving the electrodes design of the hair sensor, using Silicon-on-Insulator (SOI) wafer technology, has resulted in the ability to measure small capacitance changes as caused by minute rotations of single-hair sensors. The detection limit, as measured in a bandwidth of 3 kHz, was about 1 mm/s air-flow amplitude, an enhancement of 52% in comparison to the previous hair-sensor array design. The directivity pattern was improved now closely resembling a figure of eight. These sensors open possibilities for high-resolution flow pattern observations.

KW - IR-74160

KW - EWI-17705

KW - TST-Life like

KW - METIS-276020

U2 - 10.1109/ICSENS.2010.5690705

DO - 10.1109/ICSENS.2010.5690705

M3 - Conference contribution

SN - 978-1-4244-8168-2

SP - 2251

EP - 2254

BT - IEEE Sensors 2010 conference

PB - IEEE

T2 - 9th IEEE Sensors 2010

Y2 - 1 November 2010 through 4 November 2010

ER -