Engineering of Biomimetic Hair-Flow Sensor Arrays Dedicated to High-Resolution Flow Field Measurements

A.M.K. Dagamseh, C.M. Bruinink, H. Droogendijk, Remco J. Wiegerink, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen

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    21 Citations (Scopus)
    96 Downloads (Pure)

    Abstract

    This paper addresses the latest developments in biomimetic hair-flow sensors towards sensitive high-density arrays. Improving the electrodes design of the hair sensor, using Silicon-on-Insulator (SOI) wafer technology, has resulted in the ability to measure small capacitance changes as caused by minute rotations of single-hair sensors. The detection limit, as measured in a bandwidth of 3 kHz, was about 1 mm/s air-flow amplitude, an enhancement of 52% in comparison to the previous hair-sensor array design. The directivity pattern was improved now closely resembling a figure of eight. These sensors open possibilities for high-resolution flow pattern observations.
    Original languageUndefined
    Title of host publicationIEEE Sensors 2010 conference
    PublisherIEEE
    Pages2251-2254
    Number of pages4
    ISBN (Print)978-1-4244-8168-2
    DOIs
    Publication statusPublished - Nov 2010
    Event9th IEEE Sensors 2010 - Hilton Waikoloa Village, Waikoloa, United States
    Duration: 1 Nov 20104 Nov 2010
    Conference number: 9

    Publication series

    Name
    PublisherIEEE
    ISSN (Print)0924-4247
    ISSN (Electronic)1873-3069

    Conference

    Conference9th IEEE Sensors 2010
    CountryUnited States
    CityWaikoloa
    Period1/11/104/11/10

    Keywords

    • IR-74160
    • EWI-17705
    • TST-Life like
    • METIS-276020

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