Engineering of damage ion implanted silicon

J.R. Liefting

    Research output: Thesis › PhD Thesis - Research UT, graduation UT

    Original languageUndefined
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Wallinga, Hans, Supervisor
    • Saris, F.W., Supervisor, External person
    • Custer, J.S., Advisor, External person
    Award date18 Jun 1992
    Place of PublicationEnschede
    Publisher
    Print ISBNs90-9005097-3
    Publication statusPublished - 18 Jun 1992

    Keywords

    • METIS-111430

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