Engulfment control of platinum nanoparticles into oxidized silicon substrates for fabrication of dense solid-state nanopore arrays

Hai Le-The, Corentin Tregouet, Michael Kappl, Maren Müller, Katrin Kirchhoff, Detlef Lohse, Albert Van Den Berg, Mathieu Odijk, Jan C.T. Eijkel* (Corresponding Author)

*Corresponding author for this work

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