Enhanced diffusion upon amorphous-to-nanocrystalline phase transition in Mo/B4C/Si layered systems

V.I.T.A. de Rooij-Lohmann, A.E. Yakshin, R.W.E. van de Kruijs, E. Zoethout, A.W. Kleyn, E.G. Keim, M. Gorgoi, F. Schäfers, H.H. Brongersma, F. Bijkerk

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Abstract

The effect of an amorphous-to-nanocrystalline phase transition on the diffusion across an interface layer of subnanometer thickness has been investigated in real-time. The diffusion in the Mo/B4C/Si thin film structure studied was found to instantaneously enhance by an order of magnitude upon the formation of nanocrystals inducing the atomic-scale onset of grain boundary diffusion
Original languageEnglish
Article number014314
Number of pages5
JournalJournal of Applied Physics
Volume108
Issue number1
DOIs
Publication statusPublished - 2010

Keywords

  • EC Grant Agreement nr.: FP6/506008
  • 2023 OA procedure

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