Enhanced performance of EUV multilayer coatings

E. Louis*, A. E. Yakshin, E. Zoethout, R. W.E. Van De Kruijs, I. Nedelcu, S. Alonso Van Der Westen, T. Tsarfati, F. Bijkerk, H. Enkisch, S. Müllender, B. Wolschrijn, B. Mertens

*Corresponding author for this work

Research output: Contribution to journalConference articleAcademicpeer-review

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