Enhanced reflectance of interface engineered Mo/Si multilayers produced by thermal particle deposition

A. E. Yakshin*, R. W E Van De Kruijs, I. Nedelcu, E. Zoethout, E. Louis, F. Bijkerk, H. Enkisch, S. Müllender

*Corresponding author for this work

Research output: Contribution to journalConference articleAcademicpeer-review

36 Citations (Scopus)

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