Epitaxial PZT films for MEMS printing applications

H. Funakubo; Jan M. Dekkers; A. Sambri; S. Garglio; I.O. Shklyarevskiy; Augustinus J.H.M. Rijnders

doi:10.1557/mrs.2012.271

Epitaxial PZT films for MEMS printing applications

H. Funakubo, Jan M. Dekkers, A. Sambri, S. Garglio, I.O. Shklyarevskiy, Augustinus J.H.M. Rijnders

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Abstract

Films of piezoelectric and ferroelectric oxides have been widely investigated for various applications, including microelectromechanical systems (MEMS) for printing. Pb(Zr,Ti)O3 is of particular interest due to its excellent piezoelectric properties. Control of the density, crystalline orientation, and compositional uniformity is essential to obtain these properties. In this article, we review recent progress on the fabrication of epitaxial Pb(Zr,Ti)O3films, in which the aforementioned control can be achieved. We discuss the different approaches used for the deposition of the epitaxial piezoelectric layer as well as the achieved degrees of the epitaxy. Furthermore, the integration of these piezoelectric layers in MEMS and the corresponding performance are discussed

Original language	English
Pages (from-to)	1030-1038
Number of pages	9
Journal	MRS bulletin
Volume	37
Issue number	11
DOIs	https://doi.org/10.1557/mrs.2012.271
Publication status	Published - 2012

Keywords

METIS-289823
IR-84751

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10.1557/mrs.2012.271

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title = "Epitaxial PZT films for MEMS printing applications",

abstract = "Films of piezoelectric and ferroelectric oxides have been widely investigated for various applications, including microelectromechanical systems (MEMS) for printing. Pb(Zr,Ti)O3 is of particular interest due to its excellent piezoelectric properties. Control of the density, crystalline orientation, and compositional uniformity is essential to obtain these properties. In this article, we review recent progress on the fabrication of epitaxial Pb(Zr,Ti)O3films, in which the aforementioned control can be achieved. We discuss the different approaches used for the deposition of the epitaxial piezoelectric layer as well as the achieved degrees of the epitaxy. Furthermore, the integration of these piezoelectric layers in MEMS and the corresponding performance are discussed",

keywords = "METIS-289823, IR-84751",

author = "H. Funakubo and Dekkers, {Jan M.} and A. Sambri and S. Garglio and I.O. Shklyarevskiy and Rijnders, {Augustinus J.H.M.}",

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T1 - Epitaxial PZT films for MEMS printing applications

AU - Funakubo, H.

AU - Dekkers, Jan M.

AU - Sambri, A.

AU - Garglio, S.

AU - Shklyarevskiy, I.O.

AU - Rijnders, Augustinus J.H.M.

PY - 2012

Y1 - 2012

N2 - Films of piezoelectric and ferroelectric oxides have been widely investigated for various applications, including microelectromechanical systems (MEMS) for printing. Pb(Zr,Ti)O3 is of particular interest due to its excellent piezoelectric properties. Control of the density, crystalline orientation, and compositional uniformity is essential to obtain these properties. In this article, we review recent progress on the fabrication of epitaxial Pb(Zr,Ti)O3films, in which the aforementioned control can be achieved. We discuss the different approaches used for the deposition of the epitaxial piezoelectric layer as well as the achieved degrees of the epitaxy. Furthermore, the integration of these piezoelectric layers in MEMS and the corresponding performance are discussed

AB - Films of piezoelectric and ferroelectric oxides have been widely investigated for various applications, including microelectromechanical systems (MEMS) for printing. Pb(Zr,Ti)O3 is of particular interest due to its excellent piezoelectric properties. Control of the density, crystalline orientation, and compositional uniformity is essential to obtain these properties. In this article, we review recent progress on the fabrication of epitaxial Pb(Zr,Ti)O3films, in which the aforementioned control can be achieved. We discuss the different approaches used for the deposition of the epitaxial piezoelectric layer as well as the achieved degrees of the epitaxy. Furthermore, the integration of these piezoelectric layers in MEMS and the corresponding performance are discussed

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ER -

Epitaxial PZT films for MEMS printing applications

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