Equilibrium structuref of Si (001) in relation to absorption processes during silicon CVD

Johannes G.E. Gardeniers, F. de Jong, L.J. Giling

Research output: Contribution to journal › Article › Academic › peer-review

Keywords

@article{0b9973cacf8d444692dd6f0a14b2ed23,

title = "Equilibrium structuref of Si (001) in relation to absorption processes during silicon CVD",

keywords = "METIS-112092",

author = "Gardeniers, \{Johannes G.E.\} and \{de Jong\}, F. and L.J. Giling",

year = "1990",

language = "Undefined",

volume = "0",

pages = "123--130",

journal = "Surface science",

issn = "0039-6028",

publisher = "Elsevier B.V.",

number = "233",

}