Erosion evolution in mono-crystalline silicon surfaces caused by acoustic cavitation bubbles

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Abstract

The early stages (<180 min) of cavitation erosion of silicon surfaces were studied for three different crystallographic orientations. We introduce a quantity defined as the ratio of the relative eroded area to the number of pits, αp, to evaluate the evolution of erosion among the different substrates used. Different erosion evolution was observed for (100), (110), and (111) silicon surfaces when exposed to cavitation bubbles generated by an ultrasound signal of 191 kHz. (100) silicon substrates showed the most erosion damage, with an eroded area 2.5 times higher than the other two crystallographic orientation substrates after 180 min sonication. An apparent incubation period of 50 min was measured. The number of erosion pits increased monotonically for (110) and (111), but for (100) no increase was detected after 120 min. The collapse of a spherical bubble was simulated using an axisymmetry boundary integral method. The calculated velocity of the jet from the collapsing bubble was used to estimate the pressure P that is induced by the jet upon impact on the silicon substrate.
Original languageEnglish
Article number064902
Pages (from-to)1-13
Number of pages13
JournalJournal of applied physics
Volume113
Issue number6
DOIs
Publication statusPublished - 2013

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cavitation flow
erosion
bubbles
acoustics
silicon
boundary integral method
damage
symmetry
estimates

Keywords

  • METIS-294370
  • IR-84197

Cite this

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title = "Erosion evolution in mono-crystalline silicon surfaces caused by acoustic cavitation bubbles",
abstract = "The early stages (<180 min) of cavitation erosion of silicon surfaces were studied for three different crystallographic orientations. We introduce a quantity defined as the ratio of the relative eroded area to the number of pits, αp, to evaluate the evolution of erosion among the different substrates used. Different erosion evolution was observed for (100), (110), and (111) silicon surfaces when exposed to cavitation bubbles generated by an ultrasound signal of 191 kHz. (100) silicon substrates showed the most erosion damage, with an eroded area 2.5 times higher than the other two crystallographic orientation substrates after 180 min sonication. An apparent incubation period of 50 min was measured. The number of erosion pits increased monotonically for (110) and (111), but for (100) no increase was detected after 120 min. The collapse of a spherical bubble was simulated using an axisymmetry boundary integral method. The calculated velocity of the jet from the collapsing bubble was used to estimate the pressure P that is induced by the jet upon impact on the silicon substrate.",
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author = "{Fernandez Rivas}, David and J. Betjes and B. Verhaagen and W. Bouwhuis and Bor, {Teunis Cornelis} and Detlef Lohse and Gardeniers, {Johannes G.E.}",
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language = "English",
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pages = "1--13",
journal = "Journal of applied physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
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Erosion evolution in mono-crystalline silicon surfaces caused by acoustic cavitation bubbles. / Fernandez Rivas, David; Betjes, J.; Verhaagen, B.; Bouwhuis, W.; Bor, Teunis Cornelis; Lohse, Detlef; Gardeniers, Johannes G.E.

In: Journal of applied physics, Vol. 113, No. 6, 064902, 2013, p. 1-13.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Erosion evolution in mono-crystalline silicon surfaces caused by acoustic cavitation bubbles

AU - Fernandez Rivas, David

AU - Betjes, J.

AU - Verhaagen, B.

AU - Bouwhuis, W.

AU - Bor, Teunis Cornelis

AU - Lohse, Detlef

AU - Gardeniers, Johannes G.E.

PY - 2013

Y1 - 2013

N2 - The early stages (<180 min) of cavitation erosion of silicon surfaces were studied for three different crystallographic orientations. We introduce a quantity defined as the ratio of the relative eroded area to the number of pits, αp, to evaluate the evolution of erosion among the different substrates used. Different erosion evolution was observed for (100), (110), and (111) silicon surfaces when exposed to cavitation bubbles generated by an ultrasound signal of 191 kHz. (100) silicon substrates showed the most erosion damage, with an eroded area 2.5 times higher than the other two crystallographic orientation substrates after 180 min sonication. An apparent incubation period of 50 min was measured. The number of erosion pits increased monotonically for (110) and (111), but for (100) no increase was detected after 120 min. The collapse of a spherical bubble was simulated using an axisymmetry boundary integral method. The calculated velocity of the jet from the collapsing bubble was used to estimate the pressure P that is induced by the jet upon impact on the silicon substrate.

AB - The early stages (<180 min) of cavitation erosion of silicon surfaces were studied for three different crystallographic orientations. We introduce a quantity defined as the ratio of the relative eroded area to the number of pits, αp, to evaluate the evolution of erosion among the different substrates used. Different erosion evolution was observed for (100), (110), and (111) silicon surfaces when exposed to cavitation bubbles generated by an ultrasound signal of 191 kHz. (100) silicon substrates showed the most erosion damage, with an eroded area 2.5 times higher than the other two crystallographic orientation substrates after 180 min sonication. An apparent incubation period of 50 min was measured. The number of erosion pits increased monotonically for (110) and (111), but for (100) no increase was detected after 120 min. The collapse of a spherical bubble was simulated using an axisymmetry boundary integral method. The calculated velocity of the jet from the collapsing bubble was used to estimate the pressure P that is induced by the jet upon impact on the silicon substrate.

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