Erratum to "A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS"

Bram Krijnen, Koen R. Swinkels, Dannis M. Brouwer, Leon Abelmann, Just L. Herder

Research output: Contribution to journalComment/Letter to the editorAcademic

15 Downloads (Pure)
Original languageEnglish
Article number7185336
Pages (from-to)1659
Number of pages1
JournalJournal of microelectromechanical systems
Issue number5
Publication statusPublished - 1 Oct 2015


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