Etching behaviour of Si(001)-2x1 studied with optical anisotropy

D.J. Wentink, Herbert Wormeester, Arend van Silfhout

Research output: Contribution to journalArticleAcademicpeer-review

Original languageUndefined
Pages (from-to)7679-7686
Number of pages8
JournalPhysical review B: Condensed matter and materials physics
Volume1997
Issue number56
Publication statusPublished - 1997

Keywords

  • METIS-128650

Cite this