| Original language | Undefined |
|---|---|
| Place of Publication | Genua, Italie |
| Publication status | Published - 9 Sept 1996 |
Keywords
- METIS-130893
Etching of single domain Si(001)2x1
D.J. Wentink, Herbert Wormeester, Henricus J.W. Zandvliet, Arend van Silfhout
Research output: Other contribution › Other research output