Etching of single domain Si(001)2x1

D.J. Wentink, Herbert Wormeester, Henricus J.W. Zandvliet, Arend van Silfhout

Research output: Other contributionOther research output

Original languageUndefined
Place of PublicationGenua, Italie
Publication statusPublished - 9 Sep 1996

Keywords

  • METIS-130893

Cite this