Etching processes of transferred and non-transferred multi-layer graphene in the presence of extreme UV, H2O and H2

B. K. Mund, J. M. Sturm*, W. T.E. van den Beld, C. J. Lee, F. Bijkerk

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

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In this work we expose transferred multi-layer graphene (i.e. graphene separated from the substrate used for graphene growth and placed onto a carrier sample) to Extreme Ultraviolet light and water, in the presence of hydrogen. It is observed that graphene oxidizes by breaking down its aromatic structure into the enol form of 1,3-diketone. Furthermore, this oxidation is compared with studies on as-grown multi-layer graphene samples, which are shown to not oxidize. Our work shows that oxidation is most likely limited to a few layers of graphene at the interface between the graphene and the substrate onto which it is transferred. This is attributed to the presence of water, trapped during the transfer process, which is dissociated by secondary electrons from the substrate.

Original languageEnglish
Article number144485
JournalApplied surface science
Early online date29 Oct 2019
Publication statusPublished - 28 Feb 2020



  • UT-Hybrid-D
  • Hydrogen
  • Multi-layer graphene
  • Oxidation
  • Water
  • Extreme Ultraviolet light

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