Etching processes of transferred and non-transferred multi-layer graphene in the presence of extreme UV, H2O and H2

B. K. Mund, J. M. Sturm*, W. T.E. van den Beld, C. J. Lee, F. Bijkerk

*Corresponding author for this work

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Abstract

In this work we expose transferred multi-layer graphene (i.e. graphene separated from the substrate used for graphene growth and placed onto a carrier sample) to Extreme Ultraviolet light and water, in the presence of hydrogen. It is observed that graphene oxidizes by breaking down its aromatic structure into the enol form of 1,3-diketone. Furthermore, this oxidation is compared with studies on as-grown multi-layer graphene samples, which are shown to not oxidize. Our work shows that oxidation is most likely limited to a few layers of graphene at the interface between the graphene and the substrate onto which it is transferred. This is attributed to the presence of water, trapped during the transfer process, which is dissociated by secondary electrons from the substrate.

Original languageEnglish
Article number144485
JournalApplied surface science
Volume504
Early online date29 Oct 2019
DOIs
Publication statusE-pub ahead of print/First online - 29 Oct 2019

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Graphene
Etching
graphene
etching
Substrates
Oxidation
oxidation
Water
ultraviolet radiation
water
Hydrogen
Electrons
hydrogen

Keywords

  • Extreme Ultraviolet light
  • Hydrogen
  • Multi-layer graphene
  • Oxidation
  • Water

Cite this

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title = "Etching processes of transferred and non-transferred multi-layer graphene in the presence of extreme UV, H2O and H2",
abstract = "In this work we expose transferred multi-layer graphene (i.e. graphene separated from the substrate used for graphene growth and placed onto a carrier sample) to Extreme Ultraviolet light and water, in the presence of hydrogen. It is observed that graphene oxidizes by breaking down its aromatic structure into the enol form of 1,3-diketone. Furthermore, this oxidation is compared with studies on as-grown multi-layer graphene samples, which are shown to not oxidize. Our work shows that oxidation is most likely limited to a few layers of graphene at the interface between the graphene and the substrate onto which it is transferred. This is attributed to the presence of water, trapped during the transfer process, which is dissociated by secondary electrons from the substrate.",
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T1 - Etching processes of transferred and non-transferred multi-layer graphene in the presence of extreme UV, H2O and H2

AU - Mund, B. K.

AU - Sturm, J. M.

AU - van den Beld, W. T.E.

AU - Lee, C. J.

AU - Bijkerk, F.

PY - 2019/10/29

Y1 - 2019/10/29

N2 - In this work we expose transferred multi-layer graphene (i.e. graphene separated from the substrate used for graphene growth and placed onto a carrier sample) to Extreme Ultraviolet light and water, in the presence of hydrogen. It is observed that graphene oxidizes by breaking down its aromatic structure into the enol form of 1,3-diketone. Furthermore, this oxidation is compared with studies on as-grown multi-layer graphene samples, which are shown to not oxidize. Our work shows that oxidation is most likely limited to a few layers of graphene at the interface between the graphene and the substrate onto which it is transferred. This is attributed to the presence of water, trapped during the transfer process, which is dissociated by secondary electrons from the substrate.

AB - In this work we expose transferred multi-layer graphene (i.e. graphene separated from the substrate used for graphene growth and placed onto a carrier sample) to Extreme Ultraviolet light and water, in the presence of hydrogen. It is observed that graphene oxidizes by breaking down its aromatic structure into the enol form of 1,3-diketone. Furthermore, this oxidation is compared with studies on as-grown multi-layer graphene samples, which are shown to not oxidize. Our work shows that oxidation is most likely limited to a few layers of graphene at the interface between the graphene and the substrate onto which it is transferred. This is attributed to the presence of water, trapped during the transfer process, which is dissociated by secondary electrons from the substrate.

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