Etching technology

Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingChapterProfessional

    Original languageUndefined
    Title of host publicationCOMETT UETP MEMS
    Place of PublicationNeuchatel, Switzerland
    PublisherInternational Society for Rock Mechanics
    Pages-
    Publication statusPublished - 1995

    Publication series

    Name
    PublisherISRM

    Keywords

    • METIS-116952
    • IR-17697

    Cite this

    Elwenspoek, M. C. (1995). Etching technology. In COMETT UETP MEMS (pp. -). Neuchatel, Switzerland: International Society for Rock Mechanics.