Etching technology

Research output: Chapter in Book/Report/Conference proceedingChapterProfessional

Original languageUndefined
Title of host publicationCOMETT UETP MEMS
Place of PublicationNeuchatel, Switzerland
PublisherInternational Society for Rock Mechanics
Pages-
Publication statusPublished - 1995

Publication series

Name
PublisherISRM

Keywords

  • METIS-116952
  • IR-17697

Cite this

Elwenspoek, M. C. (1995). Etching technology. In COMETT UETP MEMS (pp. -). Neuchatel, Switzerland: International Society for Rock Mechanics.
Elwenspoek, Michael Curt. / Etching technology. COMETT UETP MEMS. Neuchatel, Switzerland : International Society for Rock Mechanics, 1995. pp. -
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author = "Elwenspoek, {Michael Curt}",
year = "1995",
language = "Undefined",
publisher = "International Society for Rock Mechanics",
pages = "--",
booktitle = "COMETT UETP MEMS",
address = "Portugal",

}

Elwenspoek, MC 1995, Etching technology. in COMETT UETP MEMS. International Society for Rock Mechanics, Neuchatel, Switzerland, pp. -.

Etching technology. / Elwenspoek, Michael Curt.

COMETT UETP MEMS. Neuchatel, Switzerland : International Society for Rock Mechanics, 1995. p. -.

Research output: Chapter in Book/Report/Conference proceedingChapterProfessional

TY - CHAP

T1 - Etching technology

AU - Elwenspoek, Michael Curt

PY - 1995

Y1 - 1995

KW - METIS-116952

KW - IR-17697

M3 - Chapter

SP - -

BT - COMETT UETP MEMS

PB - International Society for Rock Mechanics

CY - Neuchatel, Switzerland

ER -

Elwenspoek MC. Etching technology. In COMETT UETP MEMS. Neuchatel, Switzerland: International Society for Rock Mechanics. 1995. p. -