Etching technology for chromatography microchannels

R.W. Tjerkstra, Meint J. de Boer, Johan W. Berenschot, Johannes G.E. Gardeniers, Albert van den Berg, Michael Curt Elwenspoek

Research output: Contribution to journalArticleAcademicpeer-review

34 Citations (Scopus)
97 Downloads (Pure)

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