Etching technology for microchannels

R.W. Tjerkstra; Meint J. de Boer; Johan W. Berenschot; Johannes G.E. Gardeniers; Albert van den Berg; Michael Curt Elwenspoek

doi:10.1109/MEMSYS.1997.581790

Etching technology for microchannels

R.W. Tjerkstra, Meint J. de Boer, Johan W. Berenschot, Johannes G.E. Gardeniers, Albert van den Berg, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

43 Citations (Scopus)

1490 Downloads (Pure)

Abstract

Various ways of fabricating channels in silicon are discussed. Some new channels are presented: the GPSIC's and the LPCVD covered channels. Also some attention is paid to the problem of making connections of these channels to the outside world.

Original language	Undefined
Title of host publication	Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS
Place of Publication	Piscataway
Publisher	IEEE
Pages	147-152
Number of pages	6
ISBN (Print)	0-7803-3744-1
DOIs	https://doi.org/10.1109/MEMSYS.1997.581790
Publication status	Published - 26 Jan 1997
Event	10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1997 - Nagoya, Japan Duration: 26 Jan 1997 → 30 Jan 1997 Conference number: 10

Publication series

Name
Publisher	IEEE

Workshop

Workshop	10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1997
Abbreviated title	MEMS
Country/Territory	Japan
City	Nagoya
Period	26/01/97 → 30/01/97

Keywords

METIS-112885
EWI-13495
IR-16003

Access to Document

10.1109/MEMSYS.1997.581790

Cite this

@inproceedings{c698b744e5154af7a9fab8c02024f54a,

title = "Etching technology for microchannels",

abstract = "Various ways of fabricating channels in silicon are discussed. Some new channels are presented: the GPSIC's and the LPCVD covered channels. Also some attention is paid to the problem of making connections of these channels to the outside world.",

keywords = "METIS-112885, EWI-13495, IR-16003",

author = "R.W. Tjerkstra and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and Gardeniers, {Johannes G.E.} and {van den Berg}, Albert and Elwenspoek, {Michael Curt}",

year = "1997",

month = jan,

day = "26",

doi = "10.1109/MEMSYS.1997.581790",

language = "Undefined",

isbn = "0-7803-3744-1",

publisher = "IEEE",

pages = "147--152",

booktitle = "Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS",

address = "United States",

note = "10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1997 ; Conference date: 26-01-1997 Through 30-01-1997",

}

Tjerkstra, RW, de Boer, MJ, Berenschot, JW , Gardeniers, JGE , van den Berg, A & Elwenspoek, MC 1997, Etching technology for microchannels. in Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS. IEEE, Piscataway, pp. 147-152, 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1997, Nagoya, Japan, 26/01/97. https://doi.org/10.1109/MEMSYS.1997.581790

TY - GEN

T1 - Etching technology for microchannels

AU - Tjerkstra, R.W.

AU - de Boer, Meint J.

AU - Berenschot, Johan W.

AU - Gardeniers, Johannes G.E.

AU - van den Berg, Albert

AU - Elwenspoek, Michael Curt

N1 - Conference code: 10

PY - 1997/1/26

Y1 - 1997/1/26

N2 - Various ways of fabricating channels in silicon are discussed. Some new channels are presented: the GPSIC's and the LPCVD covered channels. Also some attention is paid to the problem of making connections of these channels to the outside world.

AB - Various ways of fabricating channels in silicon are discussed. Some new channels are presented: the GPSIC's and the LPCVD covered channels. Also some attention is paid to the problem of making connections of these channels to the outside world.

KW - METIS-112885

KW - EWI-13495

KW - IR-16003

U2 - 10.1109/MEMSYS.1997.581790

DO - 10.1109/MEMSYS.1997.581790

M3 - Conference contribution

SN - 0-7803-3744-1

SP - 147

EP - 152

BT - Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS

PB - IEEE

CY - Piscataway

T2 - 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1997

Y2 - 26 January 1997 through 30 January 1997

ER -