Etching technology for microchannels

R.W. Tjerkstra; Meint J. de Boer; Johan W. Berenschot; Johannes G.E. Gardeniers; Albert van den Berg; Michael Curt Elwenspoek

Etching technology for microchannels

R.W. Tjerkstra, Meint J. de Boer, Johan W. Berenschot, Johannes G.E. Gardeniers, Albert van den Berg, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Dish hotel Enschede
Publication status	Published - 11 Jun 1997

Keywords

METIS-114703

Cite this

@misc{48f1266eae204361ad6b2b790711e074,

title = "Etching technology for microchannels",

keywords = "METIS-114703",

author = "R.W. Tjerkstra and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and Gardeniers, {Johannes G.E.} and {van den Berg}, Albert and Elwenspoek, {Michael Curt}",

year = "1997",

month = jun,

day = "11",

language = "Undefined",

type = "Other",

}