Etching technology for microchannels

R.W. Tjerkstra, Meint J. de Boer, Johan W. Berenschot, Johannes G.E. Gardeniers, Albert van den Berg, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationDish hotel Enschede
    Publication statusPublished - 11 Jun 1997

    Keywords

    • METIS-114703

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