EUV full-band spectrum and DUV/EUV ratio dependency on source operating conditions

Fei Liu, Muharrem Bayraktar, Jong-Koon Lim, F. Bijkerk, Peter Havermans, Ben Claes

Research output: Contribution to conferencePosterAcademic

Original languageEnglish
Publication statusPublished - 20 Jun 2019
Event20th ASML Technology Conference 2019 - Veldhoven, Netherlands
Duration: 20 Jun 201920 Jun 2019

Conference

Conference20th ASML Technology Conference 2019
CountryNetherlands
CityVeldhoven
Period20/06/1920/06/19

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