EUV full-band spectrum and DUV/EUV ratio dependency on source operating conditions

Fei Liu, Muharrem Bayraktar, Jong-Koon Lim, F. Bijkerk, Peter Havermans, Ben Claes

Research output: Contribution to conference › Poster › Academic

Original language	English
Publication status	Published - 20 Jun 2019
Event	20th ASML Technology Conference 2019 - Veldhoven, Netherlands Duration: 20 Jun 2019 → 20 Jun 2019

Conference	20th ASML Technology Conference 2019
Country/Territory	Netherlands
City	Veldhoven
Period	20/06/19 → 20/06/19

Cite this

@conference{fee1f00bf33649578b916c5acba4d371,

title = "EUV full-band spectrum and DUV/EUV ratio dependency on source operating conditions",

author = "Fei Liu and Muharrem Bayraktar and Jong-Koon Lim and F. Bijkerk and Peter Havermans and Ben Claes",

year = "2019",

month = jun,

day = "20",

language = "English",

note = "20th ASML Technology Conference 2019 ; Conference date: 20-06-2019 Through 20-06-2019",

}