EUV induced secondary electron emission on HfO2, SnO2 and Ru thin films

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 5 Nov 2015

Keywords

  • METIS-313683

Cite this

@conference{65649be5ad7345998e35518ede136e09,
title = "EUV induced secondary electron emission on HfO2, SnO2 and Ru thin films",
keywords = "METIS-313683",
author = "Feng Liu and Sturm, {Jacobus Marinus} and E. Darlatt and M. Kolbe and Frederik Bijkerk and Lee, {Christopher James}",
year = "2015",
month = "11",
day = "5",
language = "English",
pages = "--",

}

EUV induced secondary electron emission on HfO2, SnO2 and Ru thin films. / Liu, Feng; Sturm, Jacobus Marinus; Darlatt, E.; Kolbe, M.; Bijkerk, Frederik; Lee, Christopher James.

2015. -.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - EUV induced secondary electron emission on HfO2, SnO2 and Ru thin films

AU - Liu, Feng

AU - Sturm, Jacobus Marinus

AU - Darlatt, E.

AU - Kolbe, M.

AU - Bijkerk, Frederik

AU - Lee, Christopher James

PY - 2015/11/5

Y1 - 2015/11/5

KW - METIS-313683

M3 - Poster

SP - -

ER -