EUV induced secondary electron emission on HfO2, SnO2 and Ru thin films

Feng Liu, Jacobus Marinus Sturm, E. Darlatt, M. Kolbe, Frederik Bijkerk, Christopher James Lee

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 5 Nov 2015
Event	PTB workshop Metrology - Berlin Duration: 5 Nov 2015 → 6 Nov 2015

Keywords

@conference{65649be5ad7345998e35518ede136e09,

title = "EUV induced secondary electron emission on HfO2, SnO2 and Ru thin films",

keywords = "METIS-313683",

author = "Feng Liu and Sturm, {Jacobus Marinus} and E. Darlatt and M. Kolbe and Frederik Bijkerk and Lee, {Christopher James}",

year = "2015",

month = nov,

day = "5",

language = "English",

pages = "--",

note = "PTB workshop Metrology ; Conference date: 05-11-2015 Through 06-11-2015",

}