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EUV induced secondary electron emission on HfO2, SnO2 and Ru thin films

  • Feng Liu
  • , Jacobus Marinus Sturm
  • , E. Darlatt
  • , M. Kolbe
  • , Frederik Bijkerk
  • , Christopher James Lee

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 5 Nov 2015
EventPTB workshop Metrology - Berlin
Duration: 5 Nov 20156 Nov 2015

Conference

ConferencePTB workshop Metrology
CityBerlin
Period5/11/156/11/15

Keywords

  • METIS-313683

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