EUV-multilayer coating of IR-eliminating reflection gratings

Toine van den Boogaard, Eric Louis, F.A. van Goor, Frederik Bijkerk

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 21 Feb 2010
EventSPIE Advanced Lithography 2010 - San Jose Convention Center, San Jose, United States
Duration: 21 Feb 201026 Feb 2010
https://spie.org/conferences-and-exhibitions/past-conferences-and-exhibitions/advanced-lithography-2010

Conference

ConferenceSPIE Advanced Lithography 2010
CountryUnited States
CitySan Jose
Period21/02/1026/02/10
Internet address

Keywords

  • METIS-265557

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