Fingerprint
Dive into the research topics of 'EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation
Viacheslav Medvedev, Andrey Yakshin, Robbert Wilhelmus Elisabeth van de Kruijs, V.M. Krivtsun, S.N. Yakunin, Frederik Bijkerk
Research output: Other contribution › Other research output