EUV optical elements with enhanced spectral selectivity for IR radiation

Viacheslav Medvedev, Andrey Yakshin, Robbert Wilhelmus Elisabeth van de Kruijs, V.M. Krivtsun, Eric Louis, Frederik Bijkerk

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageEnglish
Title of host publication2013 International Workshop in EUV and Soft X-ray Sources
EditorsV.V. Medvedev
Place of PublicationDublin, Ireland
PublisherEUV Litho, Inc.
Pages-
Publication statusPublished - 2013
Event2013 International Workshop on EUV and Soft X-ray Sources - University College Dublin, Dublin, Ireland
Duration: 3 Nov 20137 Nov 2013

Conference

Conference2013 International Workshop on EUV and Soft X-ray Sources
CountryIreland
CityDublin
Period3/11/137/11/13

Keywords

  • IR-100478
  • METIS-299266

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