EUV optical elements with enhanced spectral selectivity for IR radiation

Viacheslav Medvedev; Andrey Yakshin; Robbert Wilhelmus Elisabeth van de Kruijs; V.M. Krivtsun; Eric Louis; Frederik Bijkerk

EUV optical elements with enhanced spectral selectivity for IR radiation

Viacheslav Medvedev
, Andrey Yakshin
, Robbert Wilhelmus Elisabeth van de Kruijs
, V.M. Krivtsun
, Eric Louis
, Frederik Bijkerk

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	2013 International Workshop in EUV and Soft X-ray Sources
Editors	V.V. Medvedev
Place of Publication	Dublin, Ireland
Publisher	EUV Litho, Inc.
Pages	-
Publication status	Published - 2013
Event	2013 International Workshop on EUV and Soft X-ray Sources - University College Dublin, Dublin, Ireland Duration: 3 Nov 2013 → 7 Nov 2013

Conference

Conference	2013 International Workshop on EUV and Soft X-ray Sources
Country/Territory	Ireland
City	Dublin
Period	3/11/13 → 7/11/13

Keywords

IR-100478
METIS-299266

Access to Document

Medvedev Abstract 2013 Source WorkshopFinal published version, 88.3 KB

Cite this

@inproceedings{5dd71e10d5a04045a1fc765d7dade177,

title = "EUV optical elements with enhanced spectral selectivity for IR radiation",

keywords = "IR-100478, METIS-299266",

author = "Viacheslav Medvedev and Andrey Yakshin and \{van de Kruijs\}, \{Robbert Wilhelmus Elisabeth\} and V.M. Krivtsun and Eric Louis and Frederik Bijkerk",

year = "2013",

language = "English",

pages = "--",

editor = "V.V. Medvedev",

booktitle = "2013 International Workshop in EUV and Soft X-ray Sources",

publisher = "EUV Litho, Inc.",

note = "2013 International Workshop on EUV and Soft X-ray Sources ; Conference date: 03-11-2013 Through 07-11-2013",

}

EUV optical elements with enhanced spectral selectivity for IR radiation. / Medvedev, Viacheslav; Yakshin, Andrey ; van de Kruijs, Robbert Wilhelmus Elisabeth et al.
2013 International Workshop in EUV and Soft X-ray Sources. ed. / V.V. Medvedev. Dublin, Ireland: EUV Litho, Inc., 2013. p. -.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - EUV optical elements with enhanced spectral selectivity for IR radiation

AU - Medvedev, Viacheslav

AU - Yakshin, Andrey

AU - van de Kruijs, Robbert Wilhelmus Elisabeth

AU - Krivtsun, V.M.

AU - Louis, Eric

AU - Bijkerk, Frederik

PY - 2013

Y1 - 2013

KW - IR-100478

KW - METIS-299266

M3 - Conference contribution

SP - -

BT - 2013 International Workshop in EUV and Soft X-ray Sources

A2 - Medvedev, V.V.

PB - EUV Litho, Inc.

CY - Dublin, Ireland

T2 - 2013 International Workshop on EUV and Soft X-ray Sources

Y2 - 3 November 2013 through 7 November 2013

ER -