EUV optics cleanliness qualification using spectroscopic ellipsometry

Juequan Chen, Eric Louis, Herbert Wormeester, Rob Harmsen, R.W.E. van de Kruijs, Chris Lee, Willem van Schaik, Fred Bijkerk

Research output: Contribution to conferencePosterOther research output

19 Downloads (Pure)
Original languageEnglish
Number of pages1
Publication statusPublished - 21 Feb 2011
Event6th Workshop Ellipsometry 2011 - Technical University Berlin, Berlin, Germany
Duration: 21 Feb 201124 Feb 2011

Conference

Conference6th Workshop Ellipsometry 2011
CountryGermany
CityBerlin
Period21/02/1124/02/11

Keywords

  • METIS-277875

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