EUV Source Metrology

Muharrem  Bayraktar; Fei Liu; Oscar Versolato; F. Bijkerk

doi:10.1117/3.2638242.ch13

EUV Source Metrology

Muharrem Bayraktar^*
, Fei Liu
, Oscar Versolato
, F. Bijkerk

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic › peer-review

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Abstract

In this chapter, a survey of selected metrology tools for EUV photon sources is presented. Section 13.2 discusses absolutely calibrated measurement of the in-band energy with a photodiode that is combined with a multilayer mirror acting as the band limiting element. Another narrowband metrology approach based on anomalous transmission is presented as a compact alternative. In Section 13.3, literature on spectroscopy for the EUV sources is surveyed, and a transmission grating spectrometer based on a set of high-line-density freestanding gratings is introduced for broadband spectroscopy. The spectral characteristics of HHG, DPP, and LPP sources, including industrial EUV sources, characterized by the transmission grating spectrometer, are discussed.

Original language	English
Title of host publication	Photon Sources for Lithography and Metrology
Editors	Vivek Bakshi
Chapter	13
Pages	509-535
DOIs	https://doi.org/10.1117/3.2638242.ch13
Publication status	Published - 22 Sept 2023

Keywords

2023 OA procedure

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1117/3.2638242.ch13

Ch13_printFinal published version, 4.96 MBLicence: Taverne

Cite this

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AU - Bayraktar, Muharrem

AU - Liu, Fei

AU - Versolato, Oscar

AU - Bijkerk, F.

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N2 - In this chapter, a survey of selected metrology tools for EUV photon sources is presented. Section 13.2 discusses absolutely calibrated measurement of the in-band energy with a photodiode that is combined with a multilayer mirror acting as the band limiting element. Another narrowband metrology approach based on anomalous transmission is presented as a compact alternative. In Section 13.3, literature on spectroscopy for the EUV sources is surveyed, and a transmission grating spectrometer based on a set of high-line-density freestanding gratings is introduced for broadband spectroscopy. The spectral characteristics of HHG, DPP, and LPP sources, including industrial EUV sources, characterized by the transmission grating spectrometer, are discussed.

AB - In this chapter, a survey of selected metrology tools for EUV photon sources is presented. Section 13.2 discusses absolutely calibrated measurement of the in-band energy with a photodiode that is combined with a multilayer mirror acting as the band limiting element. Another narrowband metrology approach based on anomalous transmission is presented as a compact alternative. In Section 13.3, literature on spectroscopy for the EUV sources is surveyed, and a transmission grating spectrometer based on a set of high-line-density freestanding gratings is introduced for broadband spectroscopy. The spectral characteristics of HHG, DPP, and LPP sources, including industrial EUV sources, characterized by the transmission grating spectrometer, are discussed.

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BT - Photon Sources for Lithography and Metrology

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ER -

EUV Source Metrology

Abstract

Keywords

UN SDGs

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