| Original language | English |
|---|---|
| Publication status | Published - 28 Jun 2022 |
| Event | 22nd International Conference on Atomic Layer Deposition, ALD 2022 - Ghent , Belgium Duration: 26 Jun 2022 → 29 Jun 2022 Conference number: 22 |
Conference
| Conference | 22nd International Conference on Atomic Layer Deposition, ALD 2022 |
|---|---|
| Abbreviated title | ALD 2022 |
| Country/Territory | Belgium |
| City | Ghent |
| Period | 26/06/22 → 29/06/22 |
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