Evaluation of Transmission Line Model Structures for Silicide-to-Silicon Specific Contact Resistance Extraction

N. Stavitski, Mark J.H. van Dal, Anne Lauwers, Christa Vrancken, Alexeij Y. Kovalgin, Robertus A.M. Wolters

    Research output: Contribution to journal › Article › Academic › peer-review

    22 Citations (Scopus)
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